Based on white-light interferometry

a highprecision micro-displacement sensor is developed.The sensor is demodulated using a multi-level cross-correlation algorithm based on discrete cross-correlation operations.This method overcomes the strict optical alignment requirements of Michelson interferometry

eliminates crosstalk in the measured displacement signal caused by reflector angular deviation

and improves the demodulation accuracy of the micro-displacement sensor.The developed sensor features simple structure

high measurement accuracy and large dynamic measurement range.Experimental results show that the proposed micro-displacement sensor has a measurement range of 200μm and a resolution of 0.1nm

and can be applied to high-precision micro-displacement measurement scenarios such as aerospace

seabed detection and scientific research.