According to problem of structure optimal design of single-plate capacitive sensor for micro displacement measuring

a parametric modeling method for electromagnetic field simulation based on vertical and horizontal propulsion means is presented.First

on the basis of establishing reasonable electromagnetism simulation parameter model for single-plate capacitive sensor

through simulation experiment chooses optimal value for guard ring and the gap for insulating layer.Then according to optimal value obtaine by simulation experiment

comparing to the actual capacitive sensor of structure approximation to optimal value

achieve good results

error of simulation results and actual measurement capacitance value is less than 0.3 %.Finally

influence of tilt plate of capacitive sensor on measuring result is studied

when the tilt angle is 2°

error of measurement value is 1.6 %.Structure optimal result for capacitive sensor meet for practical engineering requirement.