Research on preparation of microelectrodes based on quartz and glass slides

ZHANG Xiao-fei; ZHANG Yang; TAN Qiu-lin; SUN Dong; XIONG Ji-jun; XUE Chen-yang

doi:10.13873/j.1000-97872014.07.010

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Research on preparation of microelectrodes based on quartz and glass slides

更新时间：2025-09-11

- Research on preparation of microelectrodes based on quartz and glass slides
- Vol. 33, Issue 7, Pages: 32-34+41(2014)
- 作者机构：
  
  1. 中北大学电子测试技术重点实验室
  2. 中北大学仪器科学与动态测试教育部重点实验室
  3. 香港城市大学机械及生物医学工程系
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872014.07.010
  CLC： TN492
- Published：2014
- 稿件说明：
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[1]张晓飞,张洋,谭秋林,孙东,熊继军,薛晨阳.基于石英和载玻片的微电极制备工艺研究[J].传感器与微系统,2014,33(07):32-34+41.

ZHANG Xiao-fei, ZHANG Yang, TAN Qiu-lin, et al. Research on preparation of microelectrodes based on quartz and glass slides[J]. 2014, 33(7): 32-34+41.
[1]张晓飞,张洋,谭秋林,孙东,熊继军,薛晨阳.基于石英和载玻片的微电极制备工艺研究[J].传感器与微系统,2014,33(07):32-34+41. DOI： 10.13873/j.1000-97872014.07.010.

ZHANG Xiao-fei, ZHANG Yang, TAN Qiu-lin, et al. Research on preparation of microelectrodes based on quartz and glass slides[J]. 2014, 33(7): 32-34+41. DOI： 10.13873/j.1000-97872014.07.010.

摘要

研究以石英片和载玻片为基底的微电极制备工艺

以较常见的叉指型电极为例

基于光刻工艺中各工艺参数要求

重点研究曝光和显影时间对微电极的影响。制得的2种不同基底的电极

采用对比度、精度等关键参数进行分析

最终确定选用载玻片作为芯片基底并获得其最佳工艺参数;制作带电极的PDMS—玻璃微流控芯片

通过实验

成功观察到酵母菌细胞的正、负介电泳现象。

Abstract

Take the interdigited electrodes as an example

the preparation of microelectrodes based on quartz and glass slides are investigated

based on requirement for parameters of photolithography

study is focused on influence of exposure and development time on microelectrodes.Two different electrodes are fabricated on two kinds of substrates separately

and analysis is carried out using contrast

precision and other key parameters

and slide is selected as the chip substrate

and also the optimal process parameters are obtained ultimately

fabricate PDMSglass microfluidic chip with integrated electrodes

positive and negative DEP phenomenon of yeast cells is observed through experiments successfully.

关键词

Keywords

references

图解微流控芯片实验室[M]. 科学出版社 , 林炳承, 2008

A continuous cell separation chip using hydrodynamic dielectrophoresis （DEP） process [J] . Il Doh,Young-Ho Cho. Sensors & Actuators: A. Physical . 2005 (1)

Strategies for dielectrophoretic separation in laboratory‐on‐a‐chip systems [J] . Michael P.Hughes. ELECTROPHORESIS . 2002 (16)

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