Research of a new type four-dimensional acceleration sensor

LI Min; LIU Jun; L Hua-yi; QIN Lan

doi:10.13873/j.1000-97872014.03.034

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Research of a new type four-dimensional acceleration sensor

更新时间：2025-09-11

- Research of a new type four-dimensional acceleration sensor
- Vol. 33, Issue 3, Pages: 48-51(2014)
- 作者机构：
  
  重庆大学光电技术及系统教育部重点实验室
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872014.03.034
  CLC： TP212
- Published：2014
- 稿件说明：
移动端阅览
[1]李敏,刘俊,吕华溢,秦岚.一种新型四维加速度传感器研究[J].传感器与微系统,2014,33(03):48-51.

LI Min, LIU Jun, L Hua-yi, et al. Research of a new type four-dimensional acceleration sensor[J]. 2014, 33(3): 48-51.
[1]李敏,刘俊,吕华溢,秦岚.一种新型四维加速度传感器研究[J].传感器与微系统,2014,33(03):48-51. DOI： 10.13873/j.1000-97872014.03.034.

LI Min, LIU Jun, L Hua-yi, et al. Research of a new type four-dimensional acceleration sensor[J]. 2014, 33(3): 48-51. DOI： 10.13873/j.1000-97872014.03.034.

摘要

针对高档数控机床动态振动特性的健康监测需要

提出并研究了一种单惯性质量块的压电式四维加速度传感器。介绍了传感器的结构和工作原理

推导了其数学模型

运用ANSYS有限元软件对传感器的静态灵敏度、维间耦合和动态固有频率、维间耦合等特性进行了仿真研究。研究结果表明:该四维加速度传感器能够实现四维加速度的传感

线性度好、刚度高、理论固有频率大于25kHz

无静态维间耦合

低动态维间耦合

满足传感器的设计目标。

Abstract

Aiming at need of health monitoring on dynamic vibration characteristics of high grade digitally controlled machine tools

a single inertial mass piezoelectric four-dimensional acceleration sensor is put forward.Structure and working principle of four-dimensional acceleration sensor are introduced

and its mathematic model is derived

and use ANSYS finite element software to carry out simulation study on static sensitivity

dimension coupling and dynamic natural frequency

dimension coupling.Research results show that the sensor can realize sensing of four-dimensional acceleration

it has good linearity

high rigidity

and theoretical natural frequency is more than 25 kHz

no static cross dimension coupling and low dimension coupling

which can satisfy design target of sensor.

关键词

Keywords

references

平板式压电六维力/力矩传感器的研制 [J]. 刘俊,秦岚,李敏,刘京诚,薛联. 光学精密工程 . 2011(07)

无陀螺惯性测量组合研究现状概述 [J]. 丁明理,王祁. 中国惯性技术学报 . 2005(04)

六轴加速度计的结构原理与阻尼振动设计 [J]. 唐富荣,薛大同. 传感技术学报 . 2002(04)

Single-mass 6-DOF isotropic accelerometer with segmented PSD sensors [J] . Vladimir Chapsky,Vladimir T. Portman,Ben-Zion Sandler. Sensors & Actuators: A. Physical . 2006 (2)

Design of novel thin-film piezoelectric accelerometer [J] . Y. Nemirovsky,A. Nemirovsky,P. Muralt,N. Setter. Sensors & Actuators: A. Physical . 1996 (3)

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