A high-sensitive

heat temperature difference type flow sensor is researched and fabricated by using MEMS technology.The device adopts substrate hollowed out structure which has good heat isolation performance

and the distance between thermal and heating resistors can be adjusted

so sensitivity and response speed are ensured.The thermal and heating resistors are integrated in the sensor with the bridge resistors

which enhances system stability effectively.The experiment shows suitable resistor distance can gain high sensitivity

and the system owns good linearity at the flow velocity range of 0

20 mL / min

so the sensor has excellent promotion prospect in biochemical detection and medical fields.