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Simulation of four-electrode electrochemical MEMS acceleration sensor
更新时间:2025-09-11
    • Simulation of four-electrode electrochemical MEMS acceleration sensor

    • Vol. 33, Issue 1, Pages: 18-21(2014)
    • DOI:10.13873/j.1000-97872014.01.004    

      CLC: TH824.4
    • Published:2014

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  • SU Rong-tao, LI Wei, CHE Lu-feng. Simulation of four-electrode electrochemical MEMS acceleration sensor[J]. 2014, 33(1): 18-21. DOI: 10.13873/j.1000-97872014.01.004.

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