Study of simulation design of MEMS thermoelectric cooler based on finite element analysis

XUE Wei; HE Ye; ZHANG Yi-ming; XU Fan

doi:10.13873/j.1000-97872013.12.031

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Study of simulation design of MEMS thermoelectric cooler based on finite element analysis

更新时间：2025-09-11

- Study of simulation design of MEMS thermoelectric cooler based on finite element analysis
- Vol. 32, Issue 12, Pages: 55-57+60(2013)
- 作者机构：
  
  1. 南京工业大学电子与信息工程学院
  2. 江苏英特神斯科技有限公司
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872013.12.031
  CLC： TP211.4
- Published：2013
- 稿件说明：
移动端阅览
[1]薛伟,何野,张一鸣,徐帆.基于有限元分析的MEMS热电制冷器仿真设计研究[J].传感器与微系统,2013,32(12):55-57+60.

XUE Wei, HE Ye, ZHANG Yi-ming, et al. Study of simulation design of MEMS thermoelectric cooler based on finite element analysis[J]. 2013, 32(12): 55-57+60.
[1]薛伟,何野,张一鸣,徐帆.基于有限元分析的MEMS热电制冷器仿真设计研究[J].传感器与微系统,2013,32(12):55-57+60. DOI： 10.13873/j.1000-97872013.12.031.

XUE Wei, HE Ye, ZHANG Yi-ming, et al. Study of simulation design of MEMS thermoelectric cooler based on finite element analysis[J]. 2013, 32(12): 55-57+60. DOI： 10.13873/j.1000-97872013.12.031.

摘要

优化的结构对设计具有较高热电转换效率的微型MEMS热电制冷器具有重要的意义。应用伽辽金有限元法构造了热电效应的耦合控制方程组

通过计算机仿真

采用数值计算的方法考察了微型MEMS热电制冷器模型中P

N级材料长短

横截面积和基底材料厚度的变化对微型MEMS热电制冷器件热电转换效率的影响

对设计高效的微型MEMS热电制冷器件提供了一种理论依据。

Abstract

Optimal structure has an important significance on the design of high-performance MEMS microthermoelectric cooler（ MTEC）. Galerkin finite element method（ FEM） is applied to construct coupled control equations of thermoelectric effect. Through computer simulation

this study evaluates the effects of length varrotion PN level material thickness of the substrates and cross-sectional area of MEMS MTEC model on thermoelectric conversion efficiency by the method of numerical calculation

it provides a theoretical basis for design of highefficient MEMS MTEC.

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Keywords

references

微电子芯片热电冷却系统的传热特性 [J]. 王长宏,陈颖,朱冬生. 电子元件与材料 . 2011(02)

半导体制冷研究概述 [J]. 何燕,聂宏飞,张洪兴. 科技创新导报 . 2009(24)

电子设备的散热问题与新型冷却技术的应用 [J]. 杨洪海. 新技术新工艺 . 2006(05)

有限单元法基本原理和数值方法[M]. 清华大学出版社 , 王勖成,邵敏编著, 1997

Thermoelectrics: a review of present and potential applications [J] . S.B Riffat,Xiaoli Ma. Applied Thermal Engineering . 2003 (8)

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