The quality factor（Q value）of horizontal vibration comb silicon micro resonator based on SOI technology can reach above 105 quantity level in vacuum packaging.But under constant pressure

Q value often fall to 102 or even lower due to influence of air damping.Improving the quality of resonator will increases the Q value

however

the area of resonator will be increased and the isolation layer will hard to be released.Design

fabrication and test of a series of perforated silicon micro resonators are implemented in order to improve the Q value of the horizontal resonator by reducing air damping.The research has certain meaning for structure design of horizontal vibration resonator.