A shear stress sensor array with double hot-wire based on flexible MEMS is presented

which can be applied to measure two-dimensional（2D）shear stress on curved surface and has an important significance for achievement of active control of flow field.introduces Principle and structure design of double hot-wire thermal shear stress sensor and its array;size parameters of the device are optimized by finite element simulation analysis.By MEMS technology

signal electrical bond pads are located at the backside and interference on flow field is reduced.The experimental results demonstrate that the process and device parameters design are reasonable

and the sensor array has good capability of measurement.