Research on temperature-sensitive properties of polymer bi-layer microcantilever

BAI Ying-liang1; LEI Fei1; AO Dun1; HAN Li2

doi:10.13873/j.1000-97872013.08.029

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Research on temperature-sensitive properties of polymer bi-layer microcantilever

更新时间：2025-09-11

- Research on temperature-sensitive properties of polymer bi-layer microcantilever
- Vol. 32, Issue 8, Pages: 60-62(2013)
- 作者机构：
  
  1. 北京工业大学
  2. 中国科学院电工研究所
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872013.08.029
  CLC： TP212
- Published：2013
- 稿件说明：
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[1]白英良,雷飞,奥顿,韩立.聚合物双层微悬臂梁的温度敏感特性研究[J].传感器与微系统,2013,32(08):60-62.

BAI Ying-liang1, LEI Fei1, AO Dun1, et al. Research on temperature-sensitive properties of polymer bi-layer microcantilever[J]. 2013, 32(8): 60-62.
[1]白英良,雷飞,奥顿,韩立.聚合物双层微悬臂梁的温度敏感特性研究[J].传感器与微系统,2013,32(08):60-62. DOI： 10.13873/j.1000-97872013.08.029.

BAI Ying-liang1, LEI Fei1, AO Dun1, et al. Research on temperature-sensitive properties of polymer bi-layer microcantilever[J]. 2013, 32(8): 60-62. DOI： 10.13873/j.1000-97872013.08.029.

摘要

利用微塑模技术和镀膜技术制作了一种双层聚合物悬臂梁

基于聚合物和金2种材料膨胀系数的差异

不同温度下梁的挠度不同

其形变可通过光杠杆放大由位置敏感探测器（PSD）进行检测。理论计算和实验结果表明:在聚合物悬臂梁处于玻璃态下

输出电压与温度呈线性关系。

Abstract

A novel bi-layer polymer cantilever is designed and fabricated by micromold and coating technologies

and deflection of the beam varies with temperature based on the different coefficient of the thermal expansion between polymer and Au

and deformation is measured by position sensitive detectors（PSD） after it is enlarged by optical lever.Theoretic computation and experimental results show that when polymer is under glass state

the output voltage is nearly linear with temperature.

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references

生物传感器在环境监测和发酵工业中的应用 [J]. 郑琦,卢卫红,辛平,关双红. 仪器仪表学报 . 2006(12)

一种硅/二氧化硅双层微悬臂梁温度传感器 [J]. 韩建强,朱长纯,刘君华,魏培永. 仪器仪表学报 . 2003(05)

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