Structure optimization design of HEMT micro-accelerometer

ZHAO Xiao-xia; LIANG Ting

doi:10.13873/j.1000-97872013.07.006

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Structure optimization design of HEMT micro-accelerometer

更新时间：2025-09-11

- Structure optimization design of HEMT micro-accelerometer
- Vol. 32, Issue 7, Pages: 78-80(2013)
- 作者机构：
  
  中北大学电子测试技术国家重点实验室
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872013.07.006
  CLC： TH824.4
- Published：2013
- 稿件说明：
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[1]赵晓霞,梁庭.HEMT微加速度计的结构优化设计[J].传感器与微系统,2013,32(07):78-80.

ZHAO Xiao-xia, LIANG Ting. Structure optimization design of HEMT micro-accelerometer[J]. 2013, 32(7): 78-80.
[1]赵晓霞,梁庭.HEMT微加速度计的结构优化设计[J].传感器与微系统,2013,32(07):78-80. DOI： 10.13873/j.1000-97872013.07.006.

ZHAO Xiao-xia, LIANG Ting. Structure optimization design of HEMT micro-accelerometer[J]. 2013, 32(7): 78-80. DOI： 10.13873/j.1000-97872013.07.006.

摘要

为满足HEMT微加速度计的高结构灵敏度和输出灵敏度的要求

对微加速度计的弹性结构进行了优化设计

得到一种全新的微加速度计折梁结构。利用ANSYS有限元分析软件对加速度计原结构和新结构进行仿真

通过计算和分析比较

结果表明:优化后加速度计结构合理

满足设计目标

新结构的结构灵敏度提高了1个数量级

输出灵敏度比之前增大了3倍。

Abstract

In order to meet requirements on high structural sensitivity and output sensitivity of HEMT micro-accelerometer

elastic structure of micro-accelerometer is optimized and get a new micro-accelerometer structure of fold beam.Use ANSYS finite element analysis software to simulate original structure and new structure of accelerometer.Through calculation and analysis comparison

the result shows that optimized structure of accelerometer is reasonable and meet design goal

sensitivity is an order of magnitude more than the original and output sensitivity is three times more than the original.

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references

石英振梁加速度计关键结构优化设计技术 [J]. 裴荣,王晓鸣,高旭东,于纪言. 哈尔滨工业大学学报 . 2012(05)

压阻式微加速度计的结构优化设计 [J]. 李丽华,郭涛,熊继军,徐栋. 微计算机信息 . 2007(32)

复合量程微加速度计中阻尼的分析与设计 [J]. 毛海央,熊继军,张文栋,郭涛,徐栋. 传感技术学报 . 2006(05)

新型硅微加速度传感器的设计与制作 [J]. 李军俊,刘理天,杨景铭. 清华大学学报(自然科学版) . 1999(S1)

微惯性技术[M]. 电子工业出版社 , 刘俊,石云波,李杰编著, 2005

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