Roundness error measuring system of large workpiece based on capacitive sensor

LI Hong-min1; DONG Xiao1; KANG Yan-hui2; YU Yong-xin3; JIN Li-jing1

doi:10.13873/j.1000-97872013.07.002

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Roundness error measuring system of large workpiece based on capacitive sensor

更新时间：2025-09-11

- Roundness error measuring system of large workpiece based on capacitive sensor
- Vol. 32, Issue 7, Pages: 89-92+96(2013)
- 作者机构：
  
  1. 山东建筑大学信息与电气工程学院
  2. 中国计量科学研究院长度计量科学与精密机械测量技术研究所
  3. 天津大学计算机科学与技术学院
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872013.07.002
  CLC： TG834;TP212
- Published：2013
- 稿件说明：
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[1]李红民,董晓,康岩辉,于永新,靳丽静.基于电容传感器的大型工件圆度误差测量系统[J].传感器与微系统,2013,32(07):89-92+96.

LI Hong-min1, DONG Xiao1, KANG Yan-hui2, et al. Roundness error measuring system of large workpiece based on capacitive sensor[J]. 2013, 32(7): 89-92+96.
[1]李红民,董晓,康岩辉,于永新,靳丽静.基于电容传感器的大型工件圆度误差测量系统[J].传感器与微系统,2013,32(07):89-92+96. DOI： 10.13873/j.1000-97872013.07.002.

LI Hong-min1, DONG Xiao1, KANG Yan-hui2, et al. Roundness error measuring system of large workpiece based on capacitive sensor[J]. 2013, 32(7): 89-92+96. DOI： 10.13873/j.1000-97872013.07.002.

摘要

轴类回转工件的圆度误差是衡量机床加工水平的重要指标。针对大直径轴类工件无法采用传统圆度仪进行圆度误差测量

介绍了三点法测量轴类回转工件圆度误差的理论基础、数学模型。采用非接触式电容传感器进行微位移测量

介绍了传感器结构与测量电路基本原理

搭建了适用于圆度误差测量基于电容传感器的硬件系统

应用虚拟仪器技术开发了可用于数据采集、线性校正、误差分离与评定的专用测试系统。最后进行了测试实验

通过对多次测量数据的分析评定测量系统的可靠性与精度。

Abstract

Roundness error of axial rotary workpiece is an important index for evaluation of processing level of machine tools.Aiming at large axial workpiece is unable to adopt traditional roundness measuring instrument

theoretical basis and mathematical model of the three-point method measuring axial rotary workpiece roundness error are introduced.Non-contact capacitive sensor is used to detect micro displacement

structure of sensor and basic principle of measuring circuit are given.Hardware system suitable for roundness error measuring is set up based on capacitive sensor

and special measuring system is developed by virtual instrument technology to realize data acquisition

linear correction

error separation and evaluation.In the end

experiment is carried out

reliability and precision of measuring system are evaluated through analysis on datas by multiple measurements.

关键词

Keywords

references

圆度误差算法的研究现状 [J]. 宋跃辉,朱军辉,李仙丽. 黑龙江科技信息 . 2007(18)

圆度误差测量的数学模型 [J]. 谷春栋. 鞍山钢铁学院学报 . 2000(05)

三点法圆度误差分离的近似方法及精度分析 [J]. 李济顺,洪迈生. 计量技术 . 1998(02)

大尺寸轴类零件智能量仪系统分析与误差补偿 [D]. 史俊. 吉林大学 2005

精密测量的数学方法[M]. 中国计量出版社 , 熊有伦编著, 1989

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