Aiming at disadvantages of high test cost and greater mal-function probability of traditional wired sensors which need a large number of cables

a new kind of wireless sensor using modular design method based on MEMS technology is developed.The hardware integrated circuit five kinds of modules of wireless sensor which are signal detection module

micro-controller module

memory module

wireless transceiver module and power supply module are designed

and the software is implemented.The experimental system for this developed sensor is designed to study dynamic characteristic of sensor.The experimental results show that the developed sensor has such advantages as fast dynamic response

good linearity and repeatability

which is suitable for structural low frequency vibration measurement.