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Design of piezoelectric precise actuator and its closed-loop control system
更新时间:2025-09-11
    • Design of piezoelectric precise actuator and its closed-loop control system

    • Vol. 32, Issue 5, Pages: 95-98(2013)
    • DOI:10.13873/j.1000-97872013.05.039    

      CLC: TP273
    • Published:2013

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  • SU Jiang1, LIU Peng2, YANG Zhi-gang2. Design of piezoelectric precise actuator and its closed-loop control system[J]. 2013, 32(5): 95-98. DOI: 10.13873/j.1000-97872013.05.039.

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