Fabrication and test of mercury micro-fluidic inertial switch

XU Yuan1; YANG Tao1; LIN Yi1; LIU Ting-ting1; CHEN Guang-yan2; WANG Chao2

doi:10.13873/j.1000-97872013.05.007

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Fabrication and test of mercury micro-fluidic inertial switch

更新时间：2025-09-11

- Fabrication and test of mercury micro-fluidic inertial switch
- Vol. 32, Issue 5, Pages: 114-117(2013)
- 作者机构：
  
  1. 西南科技大学信息工程学院
  2. 中国工程物理研究院电子工程研究所
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872013.05.007
  CLC： TH703
- Published：2013
- 稿件说明：
移动端阅览
[1]徐媛,杨涛,蔺怡,刘婷婷,陈光焱,王超.水银微流体惯性开关的制作与测试[J].传感器与微系统,2013,32(05):114-117.

XU Yuan1, YANG Tao1, LIN Yi1, et al. Fabrication and test of mercury micro-fluidic inertial switch[J]. 2013, 32(5): 114-117.
[1]徐媛,杨涛,蔺怡,刘婷婷,陈光焱,王超.水银微流体惯性开关的制作与测试[J].传感器与微系统,2013,32(05):114-117. DOI： 10.13873/j.1000-97872013.05.007.

XU Yuan1, YANG Tao1, LIN Yi1, et al. Fabrication and test of mercury micro-fluidic inertial switch[J]. 2013, 32(5): 114-117. DOI： 10.13873/j.1000-97872013.05.007.

摘要

针对传统微机械"固—固"型触点开关存在触点磨损、接触不稳定、导通电阻大、抗干扰能力差等缺点

设计制作了一种利用水银液滴在变矩形截面微通道中的流动来实现通断的微流体惯性开关。利用阳极键合和DRIE技术制作了开关微通道

采用溅射沉积方式沉积了Cr金属薄膜

分别通过离心转台和加速度传感器测试了开关的准静态阈值和冲击阈值

实验测试结果分别为8.525

5.09 gn。实验结果表明:冲击阈值较准静态阈值小。

Abstract

To solve disadvantages such as contact wear

contact instability

high on-resistance and signal bounce of the traditional micro-mechanical switch based on solid-solid contact

a micro-fluidic inertial switch is developed

which utilizes moving mercury droplet in micro-channel with varying rectangular cross section to close the switch.Anodic bonding and DRIE technology are adopted to fabricate micro-channel and sputtering method is employed to deposit Cr film and quasi static threshold and impact threshold are obtained which are 8.525 gn and 5.09 gn respectively by using centrifugal turntable and acceleration sensor.Experimental result shows that quasi static threshold is greater than impact threshold.

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references

惯性微流体开关阈值特性与响应历程的数值仿真 [J]. 蔺怡,杨涛,刘婷婷,陈光焱,王超. 机械设计与研究 . 2012(01)

基于毛细管阀的微流体惯性开关建模与仿真 [J]. 陈花卫,杨涛,蔺怡,周玲,陈光焱. 微纳电子技术 . 2010(12)

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