Superimposed bridge detection method acceleration transducer based on piezoresistive effect adopts ultra symmetrical structure with eight cantilevers and one mass

by placing the force sensitive resistors composed of Wheatstone bridge on the two ends of each cantilever respectively

and taking the superimposed output voltages of the 4 Wheatstone bridges as the final output of transducer

which effectively improve sensitivity of the acceleration transducer.The scheme is proved to be feasible through mathematical modeling simulational analysis.Results of performance test shows that the sensitivity of the accelerometer is 1.138 1 mV/gn

which is about four times of the sensitivity of the single bridge and the in-line bridge detection method

and the frequency response range is 0

1

000 Hz.In a

ddition

the superimposed bridge detection method provides a new thought for improving the sensitivity of piezoresistive transducer.