Research on a novel displacement measurement system of spectrum confocal

LIU Xiao-fei; DENG Wen-yi; NIU Chun-hui; JIN Bo-shi

doi:10.13873/j.1000-97872013.04.001

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Research on a novel displacement measurement system of spectrum confocal

更新时间：2025-09-11

- Research on a novel displacement measurement system of spectrum confocal
- Vol. 32, Issue 4, Pages: 34-36+40(2013)
- 作者机构：
  
  北京信息科技大学光电信息与通信工程学院
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872013.04.001
  CLC： TN247
- Published：2013
- 稿件说明：
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[1]柳晓飞,邓文怡,牛春晖,金博石.一种新型光谱共焦位移测量系统研究[J].传感器与微系统,2013,32(04):34-36+40.

LIU Xiao-fei, DENG Wen-yi, NIU Chun-hui, et al. Research on a novel displacement measurement system of spectrum confocal[J]. 2013, 32(4): 34-36+40.
[1]柳晓飞,邓文怡,牛春晖,金博石.一种新型光谱共焦位移测量系统研究[J].传感器与微系统,2013,32(04):34-36+40. DOI： 10.13873/j.1000-97872013.04.001.

LIU Xiao-fei, DENG Wen-yi, NIU Chun-hui, et al. Research on a novel displacement measurement system of spectrum confocal[J]. 2013, 32(4): 34-36+40. DOI： 10.13873/j.1000-97872013.04.001.

摘要

设计并搭建了一种光谱共焦位移测量系统。利用高斯拟合算法拟合每组实验数据

获取光谱响应曲线峰值对应的光波长值

采用Levenberg-Marquardt算法优化求解高斯函数的参数向量;利用双频激光干涉仪对系统进行标定

获得光波长和反射镜位移之间的对应关系;对整个系统作精度分析。实验结果表明:高斯拟合算法适合作为该位移测量系统的数据处理方法;用双频激光干涉仪对系统标定的方法能够准确定位反射镜的位置。该设计系统的测量范围为20 mm

测量精度为10μm

能够满足一定精度的测量要求。

Abstract

A displacement measurement system of spectrum confocal is designed and set up.Gaussian fitting algorithm is used to fit every group of experimental data to obtain corresponding optical wavelength of the peak of spectral response curve.The Levenberg-Marquardt algorithm is used to solve parameter vector of Gaussian function.The system is calibrated by using dual-frequency laser interferometer to find corresponding relationship between optical wavelength and displacements of the reflecting mirror.Precision analysis is carried out on overall system.The experimental results show that Gaussian fitting algorithm is suitable for acting as data processing method of the measurement system

and the calibrating method by dual-frequency laser interferometer can accurately locate position of reflecting mirror.Measurement range of the designed system is 20 mm

measurement precision can reach 10 μm

which can satisfy measurement requirements for certain precision.

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references

光谱共焦位移传感器测量透明材料厚度的应用 [J]. 朱万彬,曹世豪. 光机电信息 . 2011(09)

应用白光共焦光谱测量金属薄膜厚度 [J]. 马小军,高党忠,杨蒙生,赵学森,叶成钢,唐永建. 光学精密工程 . 2011(01)

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