Humidity sensor based on metal-organic framework compound modified QCM

ZHENG Qian1; XU Fen1; SUN Li-xian2; JIAO Cheng-li2; ZHANG Jian2

doi:10.13873/j.1000-97872013.03.043

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Humidity sensor based on metal-organic framework compound modified QCM

更新时间：2025-09-11

- Humidity sensor based on metal-organic framework compound modified QCM
- Vol. 32, Issue 3, Pages: 138-140+143(2013)
- 作者机构：
  
  1. 辽宁师范大学化学化工学院
  2. 中国科学院大连化学物理研究所材料热化学组
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872013.03.043
  CLC： TP212
- Published：2013
- 稿件说明：
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[1]郑倩,徐芬,孙立贤,焦成丽,张箭.基于金属有机框架化合物修饰的QCM湿度传感器[J].传感器与微系统,2013,32(03):138-140+143.

ZHENG Qian1, XU Fen1, SUN Li-xian2, et al. Humidity sensor based on metal-organic framework compound modified QCM[J]. 2013, 32(3): 138-140+143.
[1]郑倩,徐芬,孙立贤,焦成丽,张箭.基于金属有机框架化合物修饰的QCM湿度传感器[J].传感器与微系统,2013,32(03):138-140+143. DOI： 10.13873/j.1000-97872013.03.043.

ZHENG Qian1, XU Fen1, SUN Li-xian2, et al. Humidity sensor based on metal-organic framework compound modified QCM[J]. 2013, 32(3): 138-140+143. DOI： 10.13873/j.1000-97872013.03.043.

摘要

提出一种基于自行合成的钴金属框架化合物Co2（oda）2（4

4’-bipy）修饰的石英晶体微天平（QCM）的新型湿度传感器

研究了其制备条件、不同溶剂和不同修饰量对传感器性能的影响。实验结果表明:水在1.2×10-6～20×10-6范围内与频率变化量呈良好的线性关系

其相关系数为0.99903

检测灵敏度可达到87.40 Hz/10-6

检测限为0.16×10-6（信噪比为3∶1）。将此传感器在实际环境中对11%～95%RH进行了检测

结果显示频率对数变化logΔf与%RH呈良好的线性关系

其线性方程为logΔf=1.414 2+0.018 18%RH

R=0.999 65。该湿度传感器具有制备简单、体积小、选择性好、灵敏度高、稳定性好等特点

为湿度检测提供了一个新的方法。

Abstract

A novel type of humidity sensor based on Co2（oda）2（4

4’-bipy） modified quarts crystal microbalance（QCM） is presented

and effect of preparation conditions

different solvent and different modified quantity on sensor character is studied.The experimental results show that this humidity sensor has linear relation with frequency variation at range of 1.2 ×10-6

0×10-6 with correlation coefficient 0.999 03

sensitivity of 87.40 Hz/10-6 and detecting limit of 0.16 ×10-6（signal to noise ratio is 3∶ 1）.In addition

the sensor is also test in relative humidity at range of 11 %

5 %RH

result indicates that logarithmic change log Δf exhibits good linear relation wit

h %RH

and the linear equation is log Δf=1.414 2+0.018 18 %RH

R=0.999 65.The humidity sensor has characters of easy to fabricate

small size

good selectivity

high sensitivity

good stability

and provide a new method for humidity detection.

关键词

Keywords

references

基于石英晶体微天平的聚醚酰亚胺湿度传感器 [J]. 李先懿,莫晓亮,陈国荣. 真空科学与技术学报 . 2010(04)

采用聚吡咯修饰的QCM型三甲胺气体传感器 [J]. 李光,郑俊褒,傅均. 传感技术学报 . 2008(05)

涂膜压电晶体二氧化碳传感器的研究 [J]. 曹忠,徐丹,林辉概,羊小海,王彬锋,王柯敏,俞汝勤. 湖南大学学报(自然科学版) . 1996(06)

Quartz Crystal Microbalance-based Nanofibrous Membranes for Humidity Detection: Theoretical Model and Experimental Verification [J] . X-F. Wang ,,B. Ding ,,J-Y. Yu ,,J-H. He ,,G. Sun ,. International Journal of Nonlinear Sciences and Numerical Simulation . 2010 (7)

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