A high-sensitivity gas flow micro sensor is fabricated

based on thermal temperature difference principle

by using MEMS technology.This flow sensor adopts thermistor suspended structure

which has good heat isolation performance

and thermistors are fabricated by using high temperature coefficient VO2

and the flow channel is made up of SU—8 glue that has excellent mechanical and isolation performances

and this technology is simple

stable

and suitable for batch production because of low cost.The experiment shows at proper bias voltage

the sensor has fast response speed

high sensitivity

and good linearity at the flow velocity range of 0

3

0 mL/min

which fits for the applications in biochemical detection and medical fields.