Current status of MEMS pressure sensors and its applications in projectile

JIANG Bo; QI Xing-lin; ZHAO Zhi-ning; Lü Jing

doi:10.13873/j.1000-97872013.02.034

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Current status of MEMS pressure sensors and its applications in projectile

更新时间：2025-09-11

- Current status of MEMS pressure sensors and its applications in projectile
- Vol. 32, Issue 2, Pages: 4-7(2013)
- 作者机构：
  
  军械工程学院
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872013.02.034
  CLC： TP212
- Published：2013
- 稿件说明：
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[1]姜波,齐杏林,赵志宁,吕静.MEMS压力传感器现状及其在弹药上的应用[J].传感器与微系统,2013,32(02):4-7.

JIANG Bo, QI Xing-lin, ZHAO Zhi-ning, et al. Current status of MEMS pressure sensors and its applications in projectile[J]. 2013, 32(2): 4-7.
[1]姜波,齐杏林,赵志宁,吕静.MEMS压力传感器现状及其在弹药上的应用[J].传感器与微系统,2013,32(02):4-7. DOI： 10.13873/j.1000-97872013.02.034.

JIANG Bo, QI Xing-lin, ZHAO Zhi-ning, et al. Current status of MEMS pressure sensors and its applications in projectile[J]. 2013, 32(2): 4-7. DOI： 10.13873/j.1000-97872013.02.034.

摘要

随着MEMS技术、集成电路技术和材料制备与特性研究工作的进展

必将使得MEMS压力传感器的批量生产、在弹药中的大量应用成为可能。系统地分析MEMS压力传感器的特点、分类及国内外发展现状

包括研究现状、产品现状和MEMS压力传感器在弹药中的应用

对相关的科学研究具有重要意义。

Abstract

With the progress of research on technology of MEMS

integrated circuit（IC） and material preparation and characteristic study

MEMS pressure sensor will be batch produced and be used in projectile on a large scale.It has important significance for correlation scientific study to systematically analyze the characteristic

class and development status both at home and abroad of MEMS pressure sensor and applications in projectile.

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Keywords

references

高性能MEMS电容压力传感器的设计及其热分析 [J]. 吕浩杰,胡国清,邹卫,吴灿云,陈羽锋. 光学精密工程 . 2010(05)

基于MEMS技术的金属应变式压力传感器优化设计 [J]. 于留波,赵湛,方震,杜利东,丁国杰. 仪表技术与传感器 . 2010(02)

MEMS高温压力传感器研究与进展 [J]. 张冬至,胡国清,陈昌伟. 仪表技术与传感器 . 2009(11)

基于MEMS技术的介质隔离压力传感器工艺研究 [J]. 郭源生. 仪表技术与传感器 . 2008(11)

MEMS硅膜电容式气象压力传感器的研制 [J]. 庞程,赵湛,杜利东. 微纳电子技术 . 2007(Z1)

机载压阻式压力传感器设计与加工 [J]. 张栋,李永红. 仪表技术 . 2007(06)

MEMS高温接触式电容压力传感器 [J]. 冯勇建. 仪器仪表学报 . 2006(07)

一维弹道修正引信弹道敏感技术 [J]. 李东光,周国勇,马宝华. 兵工学报 . 2003(03)

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