Analysis and test of nano-optical waveguide surface roughness and scattering loss

ZANG Jun-bin1; XUE Chen-yang1; JIN Yu-jian1; TONG Xiao-gang1; WEI Li-ping1; LIU Chao1

doi:10.13873/j.1000-97872013.02.003

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Analysis and test of nano-optical waveguide surface roughness and scattering loss

更新时间：2025-09-11

- Analysis and test of nano-optical waveguide surface roughness and scattering loss
- Vol. 32, Issue 2, Pages: 27-29(2013)
- 作者机构：
  
  1. 中北大学电子测试技术国防科技重点实验室
  2. 中北大学仪器科学与动态测试教育部重点实验室
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872013.02.003
  CLC： TN252
- Published：2013
- 稿件说明：
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[1]臧俊斌,薛晨阳,晋玉剑,仝晓刚,韦丽萍,刘超.纳米光波导表面粗糙度与散射损耗的分析与测试[J].传感器与微系统,2013,32(02):27-29.

ZANG Jun-bin1, XUE Chen-yang1, JIN Yu-jian1, et al. Analysis and test of nano-optical waveguide surface roughness and scattering loss[J]. 2013, 32(2): 27-29.
[1]臧俊斌,薛晨阳,晋玉剑,仝晓刚,韦丽萍,刘超.纳米光波导表面粗糙度与散射损耗的分析与测试[J].传感器与微系统,2013,32(02):27-29. DOI： 10.13873/j.1000-97872013.02.003.

ZANG Jun-bin1, XUE Chen-yang1, JIN Yu-jian1, et al. Analysis and test of nano-optical waveguide surface roughness and scattering loss[J]. 2013, 32(2): 27-29. DOI： 10.13873/j.1000-97872013.02.003.

摘要

针对目前纳米光波导传输中散射损耗严重的问题

详细分析了表面粗糙度与波导宽度对散射损耗的影响

给出了清晰的对应关系图。设计并采用MEMS工艺制备出纳米光波导结构

在此基础上对波导结构进行了表面粗糙度的测试

进一步提出采用高温热处理方法使波导表面粗糙度降低了3 nm左右。实验发现:高温热处理后的光波导结构其散射损耗降低到3.343 dB/cm。

Abstract

Aiming at current serious problem that scattering loss in nano-optical waveguide transmission

effect of surface roughness and waveguide width on scattering loss is analyzed in detail

and clear figure of corresponding relation is given.MEMS technique is designed and used to manufacture nano-optical waveguide structures.On the basis of this test of surface roughness of optical waveguide structure is taken.Moreover

waveguide surface roughness is reduced about 3nm by the hyperthermia heat treatment method.The experimental data shows that scattering loss is reduced to 3.343 dB/cm after hyperthermia.

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references

垂直纳米光栅耦合器耦合效率分析与测试 [J]. 崔丹凤,薛晨阳,仝小刚,晋玉剑,宛克敬,张文栋. 传感技术学报 . 2011(08)

基于MZI光波导的MOEMS压力传感器 [J]. 王仕超,张晓霞,周勇,王祥斌,陈沛然,冷洁. 仪表技术与传感器 . 2009(12)

Optical waveguide propagation loss measurement using multiple reflections method [J] . Shaowu Chen,Qingfeng Yan,Qingyang Xu,Zhongchao Fan,Jingwei Liu. Optics Communications . 2005 (1)

Low-loss optical waveguide on standard SOI/SIMOX substrate [J] . A Layadi,A Vonsovici,R Orobtchouk,D Pascal,A Koster. Optics Communications . 1998 (1)

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