Micro-target is an important device for inertial confinement fusion（ICF）research.A semi-automatic micro-assembly system is developed

which can be used to assemble micro inertial confinement fusion（ICF）target which is made up of two half-hohlraum（diameter range 800 -1 000 μm

length is about 1 mm）and a capsule（diameter range 200 -500 μm）.Structure and compostion of the system is described

and the key technology and solution is introduced.The effect factors and mathematic model of online measuring system error for assembling process is analyzed.The results of target assembly experiments show that the precision of this system is not more than 10 μm.