The theoretical analytical model for electrostatically actuated flexible diaphragm micropump is improved through the combination of energy minimization method and the analytical solution for large deformation of round membrane deformation under uniform pressure.The calculation results show that the tangential strain of the membrane considered in the calculation of membrane deflection exhibits great influence on the performance of the pump.The influence of dielectric layer thickness

cavity geometry and double-cavity structure on characteristic of pump compression is also discussed.The result shows that reducing the dielectric layer thickness

cavity depth

radius of cavity

by using double-cavity structure

has positive meaning to improve character of micropump electro-statically actuated diphragm.