Simulation study on structure of coplanar capacitive sensor with multi-electrode

CAO He1; DONG En-sheng1; FAN Zuo-xian1; PANG Yu2

doi:10.13873/j.1000-97872012.12.033

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Simulation study on structure of coplanar capacitive sensor with multi-electrode

更新时间：2025-09-11

- Simulation study on structure of coplanar capacitive sensor with multi-electrode
- Vol. 31, Issue 12, Pages: 31-33+37(2012)
- 作者机构：
  
  1. 空军航空大学控制工程系
  2. 空军航空大学飞行训练基地
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872012.12.033
  CLC： TP212
- Published：2012
- 稿件说明：
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[1]曹河,董恩生,范作宪,庞宇.同面多电极电容传感器结构仿真研究[J].传感器与微系统,2012,31(12):31-33+37.

CAO He1, DONG En-sheng1, FAN Zuo-xian1, et al. Simulation study on structure of coplanar capacitive sensor with multi-electrode[J]. 2012, 31(12): 31-33+37.
[1]曹河,董恩生,范作宪,庞宇.同面多电极电容传感器结构仿真研究[J].传感器与微系统,2012,31(12):31-33+37. DOI： 10.13873/j.1000-97872012.12.033.

CAO He1, DONG En-sheng1, FAN Zuo-xian1, et al. Simulation study on structure of coplanar capacitive sensor with multi-electrode[J]. 2012, 31(12): 31-33+37. DOI： 10.13873/j.1000-97872012.12.033.

摘要

通过电磁场有限元分析软件ANSYS仿真同面双电极结构电容传感器在极板长、宽、间隙的不同组合下对电容变化率的影响

得出极板长、宽、间隙的最佳组合

构建了同面八电极电容传感器

分析比较在地屏蔽、极间屏蔽、外围屏蔽下传感器极板间电位分布和在不同屏蔽下传感器的灵敏度。仿真表明:增加屏蔽后不仅可以提高传感器的灵敏度

还可以获得比较均匀的敏感场。仿真研究结果为同面多电极电容传感器的结构设计提供了依据。

Abstract

Based on the software ANSYS

a coplanar capacitive sensor with 2-electrode structure is developed.A simulation study on effect of different combination of the gap

length and width of the electrode on capacitance change rate is carried out

and the best combination is obtained.A model of 8-electrodes of the coplanar capacitive sensor is established.The potential distribution and the sensitivity of the sensor is analyzed under the ground shield

gap shield and outer shield.Simulation result shows that increasing shielding can not only improve the sensitivity of sensor but also can get a uniform sensitive field.The result of the simulation provide basis for structure design of coplanar multi-electrode capacitive sensor.

关键词

Keywords

references

基于电容式传感测头的电容检测系统的设计 [J]. 卢歆,何明轩,李源,傅云霞,汪红. 传感器与微系统 . 2011(12)

基于ANSYS的ECT系统传感器的仿真研究 [J]. 周云龙,衣得武,高云鹏. 化工自动化及仪表 . 2011(03)

基于ANSYS的同面多电极电容传感器仿真研究 [J]. 吴云靖,董恩生,庞宇,江钦龙. 计测技术 . 2010(04)

微型电容层析成像传感器的设计及应用 [J]. 李惊涛,刘石,董向元. 仪器仪表学报 . 2007(08)

同面多电极电容传感器的仿真与试验研究 [J]. 董恩生,董永贵,吕文尔,贾惠波. 机械工程学报 . 2006(02)

电容层析成像系统传感器的仿真分析及遗传算法图像重建 [J]. 陈德运,郑贵滨,于晓洋,孙立镌. 系统仿真学报 . 2004(01)

电容层析成像系统阵列电极的优化设计 [J]. 王化祥,张立峰,朱学明. 天津大学学报 . 2003(03)

基于软场的图像成像算法研究 [D]. 胡理. 天津大学 2007

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