Design and fabrication of micro-flow channel based on SU-8

LI Xiang-hong; ZHANG Bin-zhen; MENG Xiang-jiao; FAN Xin-lei

doi:10.13873/j.1000-97872012.10.041

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Design and fabrication of micro-flow channel based on SU-8

更新时间：2025-09-11

- Design and fabrication of micro-flow channel based on SU-8
- Vol. 31, Issue 10, Pages: 94-96(2012)
- 作者机构：
  
  中北大学仪器科学与动态测试教育部重点实验室
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872012.10.041
  CLC： TP211.4
- Published：2012
- 稿件说明：
移动端阅览
[1]李向红,张斌珍,孟祥娇,范新磊.基于SU-8的微流沟道的设计和制作[J].传感器与微系统,2012,31(10):94-96.

LI Xiang-hong, ZHANG Bin-zhen, MENG Xiang-jiao, et al. Design and fabrication of micro-flow channel based on SU-8[J]. 2012, 31(10): 94-96.
[1]李向红,张斌珍,孟祥娇,范新磊.基于SU-8的微流沟道的设计和制作[J].传感器与微系统,2012,31(10):94-96. DOI： 10.13873/j.1000-97872012.10.041.

LI Xiang-hong, ZHANG Bin-zhen, MENG Xiang-jiao, et al. Design and fabrication of micro-flow channel based on SU-8[J]. 2012, 31(10): 94-96. DOI： 10.13873/j.1000-97872012.10.041.

摘要

以SU—8作为结构材料

采用紫外光刻工艺

尤以斜曝光工艺为主

制造一种新型的、小型化的、低成本的、三维的、高深宽比的微流沟道

微流沟道的高度约为1100μm。初步确定出加工此微流沟道结构所需要的曝光计量、前烘时间、后烘时间和显影时间以及工艺方法

为加工其他尺寸的微流沟道提供参考。基于此方法加工的微流沟道可以应用在微型流式细胞仪上

来提供红细胞计数、血色素浓度、血小板计数和红细胞单元指数等参数。

Abstract

SU—8 is used as stuctural material

UV light photolithography process is adopted

especially inclined exposure technology

a micro-flow channel which is a new type

miniaturization

low cost

three-dimensional structure

high aspect ratio is processed and its height is about 1100μm.Exposure dosage

prebaking time

post-baking time and development time needed by fabrication processing of the micro-flow channel are conformed preliminary to offer a reference for processing micro flow channel in a different size.The micro-flow channel based on this method is used in micro-flow cytometers

can provide many parameters such as red blood cells count

hemoglobin concentration

platelet count and red blood cell index

etc.

关键词

Keywords

references

Design and Rapid Prototyping of Thin-Film Laminate-Based Microfluidic Devices [J] . Bernhard H. Weigl,Ron Bardell,Thomas Schulte,Fred Battrell,Jon Hayenga. Biomedical Microdevices . 2001 (4)

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