Research of high sensitive resonant infraredphoto-acoustic gas sensor

FANG Xing; LI Jia; JI Xin-ming; BAO Zong-ming; HUANG Yi-ping

doi:10.13873/j.1000-97872012.10.038

Chinese

您当前的位置：

首页 >

文章列表页 >

Research of high sensitive resonant infraredphoto-acoustic gas sensor

更新时间：2025-09-11

- Research of high sensitive resonant infraredphoto-acoustic gas sensor
- Vol. 31, Issue 10, Pages: 57-60(2012)
- 作者机构：
  
  复旦大学专用集成电路及系统国家重点实验室微电子学系
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872012.10.038
  CLC： TP212.1
- Published：2012
- 稿件说明：
移动端阅览
[1]方兴,李嘉,纪新明,包宗明,黄宜平.高灵敏度谐振式红外光声气体传感器研究[J].传感器与微系统,2012,31(10):57-60.

FANG Xing, LI Jia, JI Xin-ming, et al. Research of high sensitive resonant infraredphoto-acoustic gas sensor[J]. 2012, 31(10): 57-60.
[1]方兴,李嘉,纪新明,包宗明,黄宜平.高灵敏度谐振式红外光声气体传感器研究[J].传感器与微系统,2012,31(10):57-60. DOI： 10.13873/j.1000-97872012.10.038.

FANG Xing, LI Jia, JI Xin-ming, et al. Research of high sensitive resonant infraredphoto-acoustic gas sensor[J]. 2012, 31(10): 57-60. DOI： 10.13873/j.1000-97872012.10.038.

摘要

研究了高灵敏度谐振式红外光声气体传感系统

对系统的谐振频谱进行了测试分析

观察到了新的谐振模式。经过对比

发现选用新的谐振模式具有更高的测试灵敏度和信噪比

新的谐振模式源于两边的缓冲腔体内的谐振。研究了麦克风输出腔体结构对信号的影响

发现增加输出腔内麦克风到谐振腔的距离可显著增加光声信号。另外

在激光岀射端口放置反射金属膜也有利于提高光声信号

从而提高系统检测极限。

Abstract

High sensitive resonant infrared photo-acoustic gas sensitive system is studied

the resonant frequency spectrum of the system is measured and analyzed and a new resonant model is observed.After a series of comparison

it’s found that the system has better performance in sensitivity and SNR using new resonant model.It is believed that the new resonant model is caused by the resonance of the two buffer cavities on both sides.The influence of output cavity structure of microphone on the opto-acoustic signal

it is found that the signal can be amplified obviously by increasing the distance from microphone to resonant cavity.In addition

the signal can be amplified if a reflecting metal film is located in the outlet of laser.

关键词

Keywords

references

高灵敏度小型化红外光声气体传感系统 [J]. 李俊,纪新明,周嘉,包宗明,黄宜平. 传感器与微系统 . 2011(02)

改进的一维纵向光声腔仿真模型 [J]. 姚伟,纪新明,周嘉,包宗明,鲍敏杭,黄宜平. 压电与声光 . 2010(03)

Views

119

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Sensitivity of photoelectric switch adjustable based on band-pass filter

Design and manufacture of novel microlever-enhanced MEMS accelerometer

Study on sensitivity and static stiffness of parallel six-axis acceleration sensing mechanisms

Research on robust design of capacitive MEMS pressure sensor

Study on flexible capacitive pressure sensor based on microstructure design and simulation

Related Author

MENG Xin

QIU Zhao-yun

FANG Xu-chao

ZHANG Jun-yu

CAI Zhan-xiu

GENG Zhipeng

MIAO Bin

FENG Changkun

Related Institution

School of Bioscience and Technology,Weifang Medical University

College of Mechanical Engineering，Dalian University

Suzhou Institute of Nano-Tech and Nano-Bionics Lightweight Laboratory,Chinese Academy of Sciences

Key Laboratory of Multifunctional Nanomaterials and Smart Systems,Chinese Academy of Sciences

College of Mechanical and Electrical Engineering,Nanjing Forestry University

⁰