Vacuum package is an effective method to reduce the vibration damping

and improve the quality factor

and to improve the performance of silicon MEMS linear vibratory gyroscopes.A design proposal of vacuum packaging of gyroscopes based on braze welding is introduced.The proposal is executed without using any getter

so the controllable vacuum degree can be realized.Theoretical calculation shows that

this packaging can maintain vacuum degree below 1Pa.The test on vacuum packaged gyroscope shows that the Q factor of gyroscope’s driving mode is 1700

which meets the design goals of 1500.After test for 186d

the gyro’s Q factor remains unchanged

which verifies the reliability of this vacuum packaging scheme.