Optimal design on microcantilever for scanning etching manufacture

WANG Hai1; TONG Yun-hua1; XIA Xiao-pin1; ZHOU Rong-di1

doi:10.13873/j.1000-97872012.10.005

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Optimal design on microcantilever for scanning etching manufacture

更新时间：2025-09-11

- Optimal design on microcantilever for scanning etching manufacture
- Vol. 31, Issue 10, Pages: 109-112(2012)
- 作者机构：
  
  1. 安徽工程大学机械与汽车工程学院
  2. 安徽省先进数控和伺服驱动重点实验室
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872012.10.005
  CLC： TG664
- Published：2012
- 稿件说明：
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[1]王海,童云华,夏小品,周荣荻.用于扫描刻蚀加工的微悬臂梁优化设计[J].传感器与微系统,2012,31(10):109-112.

WANG Hai1, TONG Yun-hua1, XIA Xiao-pin1, et al. Optimal design on microcantilever for scanning etching manufacture[J]. 2012, 31(10): 109-112.
[1]王海,童云华,夏小品,周荣荻.用于扫描刻蚀加工的微悬臂梁优化设计[J].传感器与微系统,2012,31(10):109-112. DOI： 10.13873/j.1000-97872012.10.005.

WANG Hai1, TONG Yun-hua1, XIA Xiao-pin1, et al. Optimal design on microcantilever for scanning etching manufacture[J]. 2012, 31(10): 109-112. DOI： 10.13873/j.1000-97872012.10.005.

摘要

扫描刻蚀加工是一种基于并行探针驱动、集成微小等离子体刻蚀原理的新型微纳米加工手段。特种悬臂梁是扫描刻蚀加工系统中的核心器件

其性能直接影响到系统的可靠性。该特种悬臂梁为集成压电陶瓷驱动薄膜的多层复合梁

在加工工艺过程中所引起的材料内部的残余应力

将导致复合梁加工释放后的弯曲变形

影响扫描刻蚀加工系统的性能。基于弹性薄板理论建立含残余应力项的多层复合梁的理论模型。利用有限元法对多层复合梁进行数值仿真

结合田口优化方法

对多层薄膜的厚度进行优化设计。

Abstract

Scanning etching manufacture is a nanofabrication method based on microplasma etching and parallel probe actuation.The piezoelectrical microcantilever is the key component of the system.The residual stress generated during the fabrication process will cause the microcantilever bending and affect the performance of system.A theoretical model of microcantilever considering residual stress is developed based on elastic plate theory and verified with FEM.Combined with taguchi method

the optimal design on the thickness of multi-layer is carried out.

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Keywords

references

微小等离子体发生器刻蚀机理的研究 [J]. 王海,文莉,向伟伟,张秋萍,褚家如. 微细加工技术 . 2008(05)

田口方法[M]. 广东经济出版社 , 文放怀, 2006

Influence of surface stress on frequency of microcantilever-based biosensors [J] . Q. Ren,Y.-P. Zhao. Microsystem Technologies . 2004 (4)

Thermal stresses in elastic multilayer systems [J] . C.H. Hsueh. Thin Solid Films . 2002 (2)

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