Study on total error model and error correction method for linear time grating sensor

GAO Zhong-hua1; CHEN Xi-hou2; YANG Ji-sen2; PENG Dong-lin2

doi:10.13873/j.1000-97872012.08.031

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Study on total error model and error correction method for linear time grating sensor

更新时间：2025-09-11

- Study on total error model and error correction method for linear time grating sensor
- Vol. 31, Issue 8, Pages: 87-89+93(2012)
- 作者机构：
  
  1. 重庆理工大学机械检测技术与装备教育部工程研究中心
  2. 合肥工业大学仪器科学与光电工程学院
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872012.08.031
  CLC： TP212.6
- Published：2012
- 稿件说明：
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[1]高忠华,陈锡侯,杨继森,彭东林.直线时栅传感器全误差模型与误差修正方法研究[J].传感器与微系统,2012,31(08):87-89+93.

GAO Zhong-hua1, CHEN Xi-hou2, YANG Ji-sen2, et al. Study on total error model and error correction method for linear time grating sensor[J]. 2012, 31(8): 87-89+93.
[1]高忠华,陈锡侯,杨继森,彭东林.直线时栅传感器全误差模型与误差修正方法研究[J].传感器与微系统,2012,31(08):87-89+93. DOI： 10.13873/j.1000-97872012.08.031.

GAO Zhong-hua1, CHEN Xi-hou2, YANG Ji-sen2, et al. Study on total error model and error correction method for linear time grating sensor[J]. 2012, 31(8): 87-89+93. DOI： 10.13873/j.1000-97872012.08.031.

摘要

为了进一步提高直线时栅位移传感器的测量精度

在建立该传感器周期误差、阿贝误差、热膨胀误差的全误差模型基础上

提出了一种组合校准的方法

利用傅里叶谐波分析和材料线膨胀原理对直线时栅的各种误差进行修正

修正后的精度可达±0.5μm/m。实验证明:该方法解决了直线测量中误差难以分离的问题

同时解决了计算机连续自动采样问题

提高了标定效率

使该方法广泛地应用于生产实践成为可能。

Abstract

A combined calibration method is presented

to improve the measuring precision of linear time grating displacement sensor.On the basis of setting up total error model of periodic errors

Abbe errors and thermal expansion errors

Fourier harmonic analysis and the principle of material liner expansion are used to correct errors.The precision reaches to ±0.5μm/m after calibrating.Experiments prove that this method solves the difficult issues of error separation in the linear measurement

and continuously automatic sampling with computer

so that the calibration efficiency is greatly enhanced

and it is possible to use this method widely in the production practice.

关键词

Keywords

references

直线式时栅传感器的动态测量与数据处理 [J]. 张天恒,彭东林,杨继森,郑方燕. 传感器与微系统 . 2011(11)

时栅位移传感器原理与发展历程 [J]. 彭东林,刘小康,张兴红,陈锡侯,朱革,杨继森,王先全,高忠华,郑方燕. 重庆理工大学学报(自然科学版) . 2010(10)

卡尔曼滤波在时栅传感器动态标定系统中的应用 [J]. 高忠华,张兴红,陈锡侯. 重庆理工大学学报(自然科学版) . 2010(02)

Bayesian networks modeling for thermal error of numerical control machine tools [J]. Xin-hua YAO, Jian-zhong FU, Zi-chen CHEN (1College of Mechanical and Energy Engineering, Zhejiang University, Hangzhou 310027, China) (2Zhejiang Provincial Key Lab of Advanced Manufacturing Technology, Hangzhou 310027, China). Journal of Zhejiang University（Science A:An International Applied Physics & Engineering Journal） . 2008(11)

时栅位移传感器研究 [J]. 彭东林,刘小康,张兴红,陈锡候. 重庆工学院学报 . 2006(05)

Turning angle sensor based on a periodic optical raster and photodetector matrix in full-frame mode [J] . D. A. Orlov,E. A. Neverova,S. V. Dmitriev. Measurement Techniques . 2011 (9)

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