Reasearch and fabrication of integrated pneumatic microvalves in polymer microfluidic chip

HUANG Shan-shi; HU Xian-qiao; HE Qiao-hong; CHEN Heng-wu

doi:10.13873/j.1000-97872012.08.014

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Reasearch and fabrication of integrated pneumatic microvalves in polymer microfluidic chip

更新时间：2025-09-11

- Reasearch and fabrication of integrated pneumatic microvalves in polymer microfluidic chip
- Vol. 31, Issue 8, Pages: 137-140(2012)
- 作者机构：
  
  浙江大学微分析系统研究所
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872012.08.014
  CLC： TN492
- Published：2012
- 稿件说明：
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[1]黄山石,胡贤巧,何巧红,陈恒武.高聚物微流控芯片上集成化气动微阀的研制[J].传感器与微系统,2012,31(08):137-140.

HUANG Shan-shi, HU Xian-qiao, HE Qiao-hong, et al. Reasearch and fabrication of integrated pneumatic microvalves in polymer microfluidic chip[J]. 2012, 31(8): 137-140.
[1]黄山石,胡贤巧,何巧红,陈恒武.高聚物微流控芯片上集成化气动微阀的研制[J].传感器与微系统,2012,31(08):137-140. DOI： 10.13873/j.1000-97872012.08.014.

HUANG Shan-shi, HU Xian-qiao, HE Qiao-hong, et al. Reasearch and fabrication of integrated pneumatic microvalves in polymer microfluidic chip[J]. 2012, 31(8): 137-140. DOI： 10.13873/j.1000-97872012.08.014.

摘要

报道了一种新型的聚甲基丙烯酸甲酯（PMMA）/聚二甲基硅氧烷（PDMS）复合芯片。该芯片采用PMMA-PDMS…PDMS-PMMA的四层构型

以在芯片上集成气动微阀。具有液路和控制通道网路的PMMA基片与PDMS弹性膜间采用不可逆封接

分别形成液路半芯片和控制半芯片

而2个半芯片则依靠PDMS膜间的粘性实现可逆封接

组成带有微阀的全芯片。这种制备方法解决了制备PMMA-PDMS-PMMA三层结构芯片的封接难题

封接过程简单可靠。其控制部分和液路部分可以单独更换

可进一步降低使用成本

尤其适合一次性应用场合。初步实验表明:该微阀具有良好的开关性能和耐用性。

Abstract

A novel polymethylmethacrylate（PMMA）/polydimethylsiloxane（PDMS）hybrid polymer microfluidic chip is reported.The chip has 4-layer structure of PMMA-PDMS…PDMS-PMMA to integrate the pneumatic microvalves.The fluid PMMA substrate and control PMMA substrate are irreversibly bonded to an elastic PDMS membrane to respectively form the fluid half chip and control half chip.Relying on the adhering property of the PDMS membranes

the fluid and control halves are reversibly bonded to form a complete chip with micro valves.This method solves the bonding problems occurred in fabricating PMMA-PDMS-PMMA 3-layer microfluidic chip and the bonding process is simple and reliable.The control half and fluid half are allowed to be replaced individually

so the operation cost can be further reduced

which makes this microfluidic chip especially suitable for disposable use.The preliminary experiment results show that the microvalve has excellent switching performance and durability.

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references

微流控芯片实验室[M]. 科学出版社 , 林炳承, 2006

微流控分析芯片的制作及应用[M]. 化学工业出版社 , 方肇伦主编, 2005

A low temperature surface modification assisted method for bonding plastic substrates [J] . M-E Vlachopoulou,A Tserepi,P Pavli,P Argitis,M Sanopoulou,K Misiakos. Journal of Micromechanics and Microengineering . 2009 (1)

Monolithic membrane valves and diaphragm pumps for practical large-scale integration into glass microfluidic devices [J] . William H Grover,Alison M Skelley,Chung N Liu,Eric T Lagally,Richard A Mathies. Sensors & Actuators: B. Chemical . 2003 (3)

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