Design on signal acquisition and processing module for a thin-film microcalorimeter

SUN Chang-yu; WU Hao; YU Jun; TANG Zhen-an

doi:10.13873/j.1000-97872012.07.038

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Design on signal acquisition and processing module for a thin-film microcalorimeter

更新时间：2025-09-11

- Design on signal acquisition and processing module for a thin-film microcalorimeter
- Vol. 31, Issue 7, Pages: 88-90+94(2012)
- 作者机构：
  
  大连理工大学电子科学与技术学院
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872012.07.038
  CLC： TP274.2
- Published：2012
- 稿件说明：
移动端阅览
[1]孙长宇,吴昊,余隽,唐祯安.薄膜微量热计的信号采集与处理模块设计[J].传感器与微系统,2012,31(07):88-90+94.

SUN Chang-yu, WU Hao, YU Jun, et al. Design on signal acquisition and processing module for a thin-film microcalorimeter[J]. 2012, 31(7): 88-90+94.
[1]孙长宇,吴昊,余隽,唐祯安.薄膜微量热计的信号采集与处理模块设计[J].传感器与微系统,2012,31(07):88-90+94. DOI： 10.13873/j.1000-97872012.07.038.

SUN Chang-yu, WU Hao, YU Jun, et al. Design on signal acquisition and processing module for a thin-film microcalorimeter[J]. 2012, 31(7): 88-90+94. DOI： 10.13873/j.1000-97872012.07.038.

摘要

薄膜微量热计是测量亚微米厚度薄膜热动力学特性的重要手段

针对薄膜微量热计的脉冲扫描量热测试方法改进了系统的信号采集与分析模块。微量热计原始信号经高精度仪用放大电路后

由高速数据采集卡采集送入PC机;采用LabVIEW软件编写的控制程序并采用Matlab软件实现数据的分析处理。对加载了70 nm厚度In薄膜的微量热计进行热容测试

观测到了In薄膜的熔化峰和熔点

表明系统具有足够高的信噪比和检测灵敏度。

Abstract

Thin film microcalorimeter is an important technology for thermodynamic measurements of thin films with sub-micron thickness.The signal acquisition and analysis module for a pulse mirocalorimetry system are improved.With a high precision instrumentation amplifier and a high-speed data acquisition card

the original signal of the microcalorimeter is amplified and collected

and sent to PC.With LabVIEW and Matlab software

the control program and data analysis are designed.The microcalorimeter with 70 nm In thin-film is measured with this pulse mirocalorimetry system

and a peak is observed at the heat capacity curve and the melting point is obtained. It shows that the system has enough high signal to noise ratio and detecting sensitivity.

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references

复合薄膜热导率测试系统研究 [J]. 吕安新,余隽,唐祯安,冯冲. 传感器与微系统 . 2010(12)

一种用于薄膜热容测量的微热量计的设计与制作 [J]. 宋青林,崔铮,夏善红,陈绍凤. 微纳电子技术 . 2003(Z1)

薄膜热物性的测试系统研究 [D]. 吕安新. 大连理工大学 2010

运算放大器应用电路设计[M]. 科学出版社 , (日)马场清太郎著, 2007

Advanced nonadiabatic ultrafast nanocalorimetry and superheating phenomenon in linear polymers [J] . A.A. Minakov,A.W. van Herwaarden,W. Wien,A. Wurm,C. Schick. Thermochimica Acta . 2007 (1)

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