Research on redundant Pt temperature sensor based on MEMS technology

JIANG Guo-guang 1; DUAN Cheng-li 2; ZHANG Hong-quan 1

doi:10.13873/j.1000-97872012.07.032

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Research on redundant Pt temperature sensor based on MEMS technology

更新时间：2025-09-11

- Research on redundant Pt temperature sensor based on MEMS technology
- Vol. 31, Issue 7, Pages: 23-25+29(2012)
- 作者机构：
  
  1. 中国电子科技集团公司第四十九研究所
  2. 中国国防科技信息中心
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872012.07.032
  CLC： TP212.11
- Published：2012
- 稿件说明：
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[1]姜国光,段成丽,张洪泉.一种基于MEMS技术的冗余Pt温度传感器研究[J].传感器与微系统,2012,31(07):23-25+29.

JIANG Guo-guang 1, DUAN Cheng-li 2, ZHANG Hong-quan 1. Research on redundant Pt temperature sensor based on MEMS technology[J]. 2012, 31(7): 23-25+29.
[1]姜国光,段成丽,张洪泉.一种基于MEMS技术的冗余Pt温度传感器研究[J].传感器与微系统,2012,31(07):23-25+29. DOI： 10.13873/j.1000-97872012.07.032.

JIANG Guo-guang 1, DUAN Cheng-li 2, ZHANG Hong-quan 1. Research on redundant Pt temperature sensor based on MEMS technology[J]. 2012, 31(7): 23-25+29. DOI： 10.13873/j.1000-97872012.07.032.

摘要

为了提高Pt温度传感器的响应时间和可靠性水平

设计了一种MEMS冗余结构的新型温度传感器。结构基体采用可微加工0.1 mm厚的γ-Al2O3陶瓷;敏感薄膜由磁控溅射沉积而成

并采用离子束刻蚀方法加工成标准阻值。分析和测试表明:传感器输出与温度变化呈线性关系

空气状态下的90%响应时间小于60 s

在-20～180℃温区内非线性小于0.01%。采用二单元冗余设计的并联工作方式可有效提高传感器的可靠水平。

Abstract

A new type of temperature sensor based on MEMS redundant structure is designed to raise the response time and the reliability level of Pt temperature sensor.The γ-Al 2O3 ceramics with thickness of 0.1 mm can be micro-machined.The sensitive films are formed by sputtering and depositting which are controlled by magnetism

and the standard resistance is manufactured by ion beam etching.The analysis and tests show that the relation between the output of sensor and the temperature change is linear.90 % response time is less than 60 s in the air

and the nonlineary is less than 0.01 % in range of the temperature-20 ℃～ 180 ℃.The parallel-connected work mode which is designed by binary redundant units can improve the reliability level of sensors.

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Keywords

references

基于γ-Al 2 O 3 膜微加工煤油传感器研究 [J]. 张洪泉,乔英杰,范茂军. 传感器与微系统 . 2012(03)

一种新型MEMS温度传感器 [J]. 时子青,陈向东,龚静,李秀梅. 传感器与微系统 . 2011(09)

一种新型MEMS温度传感器的设计 [J]. 陆婷婷,秦明,黄庆安. 功能材料与器件学报 . 2008(01)

Study on Environmental Multi-parameter Sensor Based on MEMS [J]. Hongquan Zhang~(1,3) Tong Zhang~2 Likai Sun~3 Yunbo Shi~3 Jianying Guo~1 (1.Harbin University of Science and Technology,Harbin 150080,China) (2.Automobile Electronic Engineering Technology Research and Development Center,Harbin 150001,China) (3.Northeast Transducer Technology Research Institute,Harbin 150001,China). 稀有金属材料与工程 . 2006(S3)

可靠性设计与分析[M]. 国防工业出版社 , 陆廷孝,郑鹏洲主编, 1995

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