Research on 3D MEMS acceleration sensor for seismic exploration

CHEN Gui-hui; LIU Jian-sheng; LI Li; YANG Fan

doi:10.13873/j.1000-97872012.04.038

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Research on 3D MEMS acceleration sensor for seismic exploration

更新时间：2025-09-11

- Research on 3D MEMS acceleration sensor for seismic exploration
- Vol. 31, Issue 4, Pages: 70-71+78(2012)
- 作者机构：
  
  西南石油大学电子信息工程学院
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872012.04.038
  CLC： TP212
- Published：2012
- 稿件说明：
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[1]谌贵辉,刘建生,李礼,杨帆.地震勘探用三维MEMS加速度传感器的研究[J].传感器与微系统,2012,31(04):70-71+78.

CHEN Gui-hui, LIU Jian-sheng, LI Li, et al. Research on 3D MEMS acceleration sensor for seismic exploration[J]. 2012, 31(4): 70-71+78.
[1]谌贵辉,刘建生,李礼,杨帆.地震勘探用三维MEMS加速度传感器的研究[J].传感器与微系统,2012,31(04):70-71+78. DOI： 10.13873/j.1000-97872012.04.038.

CHEN Gui-hui, LIU Jian-sheng, LI Li, et al. Research on 3D MEMS acceleration sensor for seismic exploration[J]. 2012, 31(4): 70-71+78. DOI： 10.13873/j.1000-97872012.04.038.

摘要

以MEMS加速度传感器为基础的新型数字地震检波器是地震勘探所用仪器的发展方向之一。介绍了一种三维MEMS加速度检波器结构

这有别于传统三分量MEMS传感器通过用3只MEMS加速度传感器按正交直角组装。并通过PSpice软件对其进行了整体仿真

仿真结果表明其阶跃响应和正弦响应基本和理论分析的结果吻合。

Abstract

Based on the MEMS acceleration sensor

a new type of digital geophone equipment used in seismic exploration is one of the developing directions.The structure of a 3D MEMS acceleration sensor

which is different from the traditional three-component MEMS sensor that is composed of three MEMS accelerometers according to the orthogonal angle assembly is described.The overall simulation is carried out by PSpice software.The simulation result shows that the step response and sinusoidal response mostly correspond with the results of the theoretical analysis.

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references

地震检波器技术与发展研究 [J]. 陈金鹰,龚江涛,庞进,席华. 物探化探计算技术 . 2007(05)

基于微电子系统（MEMS）加速度地震勘探三分量数字检波器简介 [J]. 张莉,解文荣,李秀荣. 中国煤田地质 . 2006(02)

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