Performance analysis on RF MEMS switches based on insulating fluid filled applied in packaging

SONG Ming-xin1; YIN Jing-hua1; GUO Hai1

doi:10.13873/j.1000-97872012.04.035

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Performance analysis on RF MEMS switches based on insulating fluid filled applied in packaging

更新时间：2025-09-11

- Performance analysis on RF MEMS switches based on insulating fluid filled applied in packaging
- Vol. 31, Issue 4, Pages: 53-55+59(2012)
- 作者机构：
  
  1. 哈尔滨理工大学应用科学学院电子科学与技术系
  2. 哈尔滨理工大学工程电介质及其应用技术教育部重点实验室
  3. 大连民族学院计算机科学与工程学院
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872012.04.035
  CLC： TP211.4
- Published：2012
- 稿件说明：
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[1]宋明歆,殷景华,郭海.基于绝缘液体充填封装RFMEMS开关特性分析[J].传感器与微系统,2012,31(04):53-55+59.

SONG Ming-xin1, YIN Jing-hua1, GUO Hai1. Performance analysis on RF MEMS switches based on insulating fluid filled applied in packaging[J]. 2012, 31(4): 53-55+59.
[1]宋明歆,殷景华,郭海.基于绝缘液体充填封装RFMEMS开关特性分析[J].传感器与微系统,2012,31(04):53-55+59. DOI： 10.13873/j.1000-97872012.04.035.

SONG Ming-xin1, YIN Jing-hua1, GUO Hai1. Performance analysis on RF MEMS switches based on insulating fluid filled applied in packaging[J]. 2012, 31(4): 53-55+59. DOI： 10.13873/j.1000-97872012.04.035.

摘要

提出并设计一种采用绝缘液体充填封装的RF MEMS开关

分析其工作原理

并以高压油、蓖麻油、甘油为绝缘液体充填封装

仿真分析绝缘液体对RF MEMS开关的驱动电压、冲击速度、响应时间、开关电容等方面的影响。结果表明:绝缘液体充填封装有效地将驱动电压降为原来的1/εr

降低上极板对下极板的冲击速度。对3种液态封装材料性能分析

蓖麻油效果最好:阈值电压下降了一半

约为10 V;当驱动电压为20 V时

响应时间为40.6μs

优于高压油（91.3μs）、甘油（89.9μs）

冲击速度约为1.26 m/s。

Abstract

A new structure of RF MEMS switches which is filled with insulating fluid in packaging is presented and designed and the basic working principle is analyzed.The transformer oil

castor oil and glycerin are used as insulating fluid.The influence of insulating fluid which fills RF MEMS switches on driving voltage

impact speed

response time and on-off capacitance characteristics is discussed by simulation analysis.The results show that the driving voltage is dropped to 1/εr times

the impact speed is effective reduced.Compared with the characteristics of three kinds of insulating fluid

the performances of the castor oil are excellent.The threshold voltage is dropped by half

about 10V.When the driving voltage is 20V

the response time of the castor oil is 40.6 μs which is better than the transformer oil（91.3 μs） and glycerin（89.9 μs）

and the impact speed is 1.26m/s.

关键词

Keywords

references

RF MEMS理论·设计·技术[M]. 东南大学出版社 , (美)GabrielM.Rebeiz著, 2005

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