Design of signal processing circuit of laser ultrasonic based on phase lock-in amplifier technology

JIN Bao-yin; Dante Dorantes; BAI Mao-sen; SUN Feng-ming; LI Yan-ning; CHEN Zhi; HU Xiao-tang

doi:10.13873/j.1000-97872012.03.002

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Design of signal processing circuit of laser ultrasonic based on phase lock-in amplifier technology

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- Design of signal processing circuit of laser ultrasonic based on phase lock-in amplifier technology
- Vol. 31, Issue 3, Pages: 109-112(2012)
- 作者机构：
  
  天津大学精密测试技术及仪器国家重点实验室
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872012.03.002
  CLC： TN247;TN911.7
- Published：2012
- 稿件说明：
移动端阅览
[1]金宝印,Dante Dorantes,白茂森,孙凤鸣,李艳宁,陈治,胡小唐.基于锁相放大技术的激光超声信号处理电路的设计[J].传感器与微系统,2012,31(03):109-112.

JIN Bao-yin, Dante Dorantes, BAI Mao-sen, et al. Design of signal processing circuit of laser ultrasonic based on phase lock-in amplifier technology[J]. 2012, 31(3): 109-112.
[1]金宝印,Dante Dorantes,白茂森,孙凤鸣,李艳宁,陈治,胡小唐.基于锁相放大技术的激光超声信号处理电路的设计[J].传感器与微系统,2012,31(03):109-112. DOI： 10.13873/j.1000-97872012.03.002.

JIN Bao-yin, Dante Dorantes, BAI Mao-sen, et al. Design of signal processing circuit of laser ultrasonic based on phase lock-in amplifier technology[J]. 2012, 31(3): 109-112. DOI： 10.13873/j.1000-97872012.03.002.

摘要

利用激光声表面波（SAW）技术对膜材料机械特性的测量（如杨氏模量、密度、厚度等）已得到了越来越广泛的应用。但激光激发激光检测声表面波（LG/LD-SAW）的频谱带宽较宽（达几百兆到GHz）

一般的检测方法难以在如此高的带宽下对其进行检测。设计了一种基于锁相放大（LIA）原理的微弱信号处理电路

通过应用一特殊的去噪电路

能在很宽的频谱（GHz）范围检测微弱信号

并将其从噪声信号中提取出来。

Abstract

Laser surface acoustic wave（SAW） technology for measuring thin film mechanical properties such as Young’s modulus

density

thickness

and so on

has been widely used.However

due to wide spectrum bandwidth（up to several hundred MHz to GHz） of laser-generate and laser-detecting surface acoustic wave（LG/LD-SAW）

general methods can not detect it in such a high bandwidth.A weak signal processing circuit based on lock-in amplifier（LIA） is proposed

and it achieves GHz detection of weak signals through using a special de-noising circuit and it can be extracted from noise signal.

关键词

Keywords

references

微弱信号检测技术[M]. 电子工业出版社 , 刘俊,张斌珍编著, 2005

微弱信号检测[M]. 清华大学出版社 , 高晋占编著, 2004

基于运算放大器和模拟集成电路的电路设计[M]. 西安交通大学出版社 , (美)赛尔吉殴·佛朗哥（SergioFranco）著, 2004

Theoretical study of mechanical properties of multi-layer ULSI interconnect dielectrics by surface acoustic wave method [J] . Xia Xiao,Xueyi You,Suying Yao. Microelectronics Journal . 2006 (10)

A review of atomic force microscopy imaging systems: application to molecular metrology and biological sciences [J] . Nader Jalili,Karthik Laxminarayana. Mechatronics . 2004 (8)

Laser detection of surface acoustic waves as a method of measuring an Ar ion beam modification of carbon thin film [J] . Sin-iti Kitazawa,Teguh Yulius Surya Panca Putra,Seiji Sakai,Kazumasa Narumi,Hiroshi Naramoto,Shunya Yamamoto,Atsuya Chiba. Nuclear Inst. and Methods in Physics Research, B . 2003

Thin-film elastic-property measurements with laser-ultrasonic SAW spectrometry [J] . D.C Hurley,V.K Tewary,A.J Richards. Thin Solid Films . 2001

Characterization of thin-film aerogel porosity and stiffness with laser-generated surface acoustic waves [J] . C.M. Flannery,C. Murray,I. Streiter,S.E. Schulz. Thin Solid Films . 2001 (1)

Materials issues in microelectromechanical systems （MEMS） [J] . S.M Spearing. Acta Materialia . 2000 (1)

Application of the ferroelectric materials to ULSI memories [J] . Yasuo Tarui,Tadahiko Hirai,Kazuhiro Teramoto,Hiroshi Koike,Kazuhito Nagashima. Applied Surface Science . 1997

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