Research progress of thin film thermocouple temperature sensor

ZHAO Yuan-shen; YANG Li-hong

doi:10.13873/j.1000-97872012.02.035

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Research progress of thin film thermocouple temperature sensor

更新时间：2025-09-11

- Research progress of thin film thermocouple temperature sensor
- Vol. 31, Issue 2, Pages: 1-3+7(2012)
- 作者机构：
  
  上海理工大学机械工程学院
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872012.02.035
  CLC： TP212.1
- Published：2012
- 稿件说明：
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[1]赵源深,杨丽红.薄膜热电偶温度传感器研究进展[J].传感器与微系统,2012,31(02):1-3+7.

ZHAO Yuan-shen, YANG Li-hong. Research progress of thin film thermocouple temperature sensor[J]. 2012, 31(2): 1-3+7.
[1]赵源深,杨丽红.薄膜热电偶温度传感器研究进展[J].传感器与微系统,2012,31(02):1-3+7. DOI： 10.13873/j.1000-97872012.02.035.

ZHAO Yuan-shen, YANG Li-hong. Research progress of thin film thermocouple temperature sensor[J]. 2012, 31(2): 1-3+7. DOI： 10.13873/j.1000-97872012.02.035.

摘要

随着低维材料技术的发展和对测温要求的提高

薄膜热电偶温度传感器应运而生

其快速响应特性为测量瞬变温度提供了可能。综述了薄膜热电偶温度传感器国内外发展现状

着重介绍了薄膜临界厚度的确定、扩散现象的影响、制备工艺等关键技术

并对其未来发展做出了展望。

Abstract

The thin film thermocouple temperature sensor is created with the development of low-dimensional materials technology and the increase of temperature measurement requirements.It is possible to measure transient temperature by using the thin film thermocouple temperature sensor as its rapid response characteristics.The domestic and foreign development present situation is summarized.The technical problem such as determining the critical thickness

the influence of diffusion

preparation technology is also introduced emphatically.Its development direction in the future is also presented.

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references

溅射薄膜热电偶在非金属结构表面瞬态温度测量中的应用研究 [J]. 郝庆瑞,姜亚军. 宇航计测技术 . 2010(02)

NiCr/NiSi薄膜热电偶传感器的研制及有限元模拟 [J]. 朱亚民,张军,崔云先,孙奉道. 仪表技术与传感器 . 2008(09)

薄膜热电偶动态特性标定技术研究现状 [J]. 任玲,黄凤良. 传感器与微系统 . 2006(10)

基于模型参考的薄膜热电偶传感器动态误差补偿算法 [J]. 刘清. 南京师范大学学报(工程技术版) . 2006(01)

化爆材料瞬态切削温度的NiCr/NiSi薄膜热电偶温度传感器的研制 [J]. 曾其勇,孙宝元,徐静,贾颖,崔云先,邓新禄,徐军. 机械工程学报 . 2006(03)

磁控溅射法制备NiCr/NiSi薄膜热电偶温度传感器 [J]. 贾颖,孙宝元,曾其勇,徐静. 仪表技术与传感器 . 2006(02)

热电偶温度传感器的研究与发展现状 [J]. 刘洋,吴双,赵永刚. 中国仪器仪表 . 2003(11)

温度传感功能薄膜技术 [J]. 张以忱,巴德纯,刘希东,高航. 真空科学与技术 . 2003(05)

瞬态表面温度传感器的校准技术研究 [J]. 梁列国,周汉昌,赵冬娥,潘德恒. 兵工学报 . 2001(02)

便携式薄膜热电偶测温传感器 [J]. 薛晖,李付国,黄吕权. 传感器技术 . 1996(01)

薄膜温度传感器的研制及应用 [J]. 安保合. 推进技术 . 1992(01)

薄膜温度传感器的研制 [D]. 朱亚民. 大连理工大学 2007

薄膜技术与薄膜材料[M]. 清华大学出版社 , 田民波编著, 2006

薄膜物理[M]. 电子工业出版社 , 薛增泉等编著, 1991

Thin film SnO 2 -based gas sensors: Film thickness influence [J] . G. Korotcenkov,B.K. Cho. Sensors & Actuators: B. Chemical . 2009 (1)

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