Design of detection and control circuits for capacitive microaccelerometer based on non-silicon MEMS

ZHANG Yun-kui; CUI Feng; WAN Zhen; LIU Wu; ZHANG Wei-ping

doi:10.13873/j.1000-97872012.02.010

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Design of detection and control circuits for capacitive microaccelerometer based on non-silicon MEMS

更新时间：2025-09-11

- Design of detection and control circuits for capacitive microaccelerometer based on non-silicon MEMS
- Vol. 31, Issue 2, Pages: 90-92+95(2012)
- 作者机构：
  
  上海交通大学微纳科学技术研究院微米/纳米加工技术国家级重点实验室
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872012.02.010
  CLC： TH824.4
- Published：2012
- 稿件说明：
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[1]张运奎,崔峰,万镇,刘武,张卫平.非硅MEMS电容式微加速度计的测控电路设计[J].传感器与微系统,2012,31(02):90-92+95.

ZHANG Yun-kui, CUI Feng, WAN Zhen, et al. Design of detection and control circuits for capacitive microaccelerometer based on non-silicon MEMS[J]. 2012, 31(2): 90-92+95.
[1]张运奎,崔峰,万镇,刘武,张卫平.非硅MEMS电容式微加速度计的测控电路设计[J].传感器与微系统,2012,31(02):90-92+95. DOI： 10.13873/j.1000-97872012.02.010.

ZHANG Yun-kui, CUI Feng, WAN Zhen, et al. Design of detection and control circuits for capacitive microaccelerometer based on non-silicon MEMS[J]. 2012, 31(2): 90-92+95. DOI： 10.13873/j.1000-97872012.02.010.

摘要

为了提高MEMS微加速度计的量程和抗过载能力

设计了基于UV-LIGA技术的非硅MEMS电容式微加速度计。针对该加速度计

设计了基于相敏解调的差分电容测控电路。检测通道主要由前置级电荷积分放大电路、带通滤波电路、相敏解调器、低通滤波以及电平转换电路组成

反馈通道由低通滤波和加法电路组成。完成了微加速度计测控电路的调试和检测通道的标定实验

实验表明:检测通道的量程约为±6 pF

灵敏度为89.3 mV/pF

线性度为2.59%

满足加速度计检测通道的要求。

Abstract

To improve the anti-over loading capability of MEMS microaccelerometer

a new non-silicon MEMS capacitive microaccelerometer based on UV-LIGA technology and its detection and control circuits of differential capacitance based on phase-sensitive demodulation is designed.The detection channel mainly consists of charge integrated preamplifier

band-pass filter

phase-sensitive demodulator

low-pass filter and voltage conversion circuits.The feedback channel consists of low-pass filter and adder circuits.The debugging of system detection and control circuits and the calibration for the detection channel is finished.The results show that the range of the detection channel is about ±6 pF

the sensitivity is 89.3 mV/pF

and linearity is 2.59 % respectively

which can meet the requirements of the detection channel.

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references

静电悬浮转子微陀螺信号发生电路有源带通滤波器设计 [J]. 邵珰珰,陈文元,肖奇军,崔峰,张卫平. 传感技术学报 . 2008(11)

双定子静电微电机控制系统的信号检测研究 [J]. 张忠榕,刘武,张卫平,陈文元. 传感器与微系统 . 2008(05)

微弱信号检测技术[M]. 电子工业出版社 , 刘俊,张斌珍编著, 2005

Experiment design and UV-LIGA microfabrication technology to study the fracture toughness of Ni microstructures [J] . Wen Dai,Catherine Oropeza,Kun Lian,Wanjun Wang. Microsystem Technologies . 2006 (4)

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