Design of signal conditioning circuit for three-phase grating type displacement sensor based on MEMS

ZHU Ge; LUO Jing; GUO Zeng-qiang; YUAN Ya-hui; WANG Ling

doi:10.13873/j.1000-97872012.01.034

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Design of signal conditioning circuit for three-phase grating type displacement sensor based on MEMS

更新时间：2025-09-11

- Design of signal conditioning circuit for three-phase grating type displacement sensor based on MEMS
- Vol. 31, Issue 1, Pages: 94-96(2012)
- 作者机构：
  
  重庆理工大学机械检测技术与装备教育部工程研究中心
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872012.01.034
  CLC： TP212
- Published：2012
- 稿件说明：
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[1]朱革,罗静,郭增强,袁亚辉,王玲.基于MEMS三相栅式位移传感器信号调理电路设计[J].传感器与微系统,2012,31(01):94-96.

ZHU Ge, LUO Jing, GUO Zeng-qiang, et al. Design of signal conditioning circuit for three-phase grating type displacement sensor based on MEMS[J]. 2012, 31(1): 94-96.
[1]朱革,罗静,郭增强,袁亚辉,王玲.基于MEMS三相栅式位移传感器信号调理电路设计[J].传感器与微系统,2012,31(01):94-96. DOI： 10.13873/j.1000-97872012.01.034.

ZHU Ge, LUO Jing, GUO Zeng-qiang, et al. Design of signal conditioning circuit for three-phase grating type displacement sensor based on MEMS[J]. 2012, 31(1): 94-96. DOI： 10.13873/j.1000-97872012.01.034.

摘要

根据基于微机电系统（MEMS）的三相栅式位移传感器测量原理和输出信号特点

设计了一种信号调理电路。该电路主要由差分前置放大电路、带通有源滤波器和波形变换电路组成。波形变换电路设计采用了非线性放大方法来提高信噪比和检测灵敏度。以此信号调理电路搭建的位移测量系统读数稳定性达到1″

表明该电路稳定性达到测量要求。

Abstract

Signal conditioning circuit of MEMS-based three-phase grating type displacement sensor is designed based on its measuring principle and output signal.The conditioning circuit consists of differential pre-amplifier

band-pass fountainhead filter and waveform converting circuit.In order to improve the detection sensitivity and signal noise ration

the non-linear amplification is used in design of waveform converting circuit.Reading stability of the measurement system of displacement can be as good as 1″

that means the conditioning circuit has a good stability to meet the needs of measurement.

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references

基于MEMS矢量水听器微弱信号提取电路的设计与测试 [J]. 王建平,张国军,薛晨阳,关凌纲,赵雷,姚荣国. 仪表技术与传感器 . 2010(07)

时栅位移传感器智能化实现方法研究 [J]. 刘小康,费业泰,彭东林,张兴红. 仪器仪表学报 . 2008(06)

MEMS传感器和智能传感器的发展 [J]. 刘凯,陈志东,邹德福,马丽敏. 仪表技术与传感器 . 2007(09)

新型时栅位移传感器研究 [D]. 陈锡侯. 重庆大学 2007

现代传感技术基础及应用[M]. 清华大学出版社 , 赵学增, 2010

模拟电子技术基础[M]. 高等教育出版社 , 华成英,童诗白主编, 2006

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