Real-time control system for spot area of high power pulsed laser

ZHANG Feng-lie; FU Xing; LIN Qian; HU Xiao-tang

doi:10.13873/j.1000-97872012.01.002

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Real-time control system for spot area of high power pulsed laser

更新时间：2025-09-11

- Real-time control system for spot area of high power pulsed laser
- Vol. 31, Issue 1, Pages: 127-129+132(2012)
- 作者机构：
  
  天津大学精密测试技术及仪器国家重点实验室
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872012.01.002
  CLC： TN248;TP391.41
- Published：2012
- 稿件说明：
移动端阅览
[1]张峰烈,傅星,林谦,胡小唐.大功率脉冲激光光斑面积的实时控制系统[J].传感器与微系统,2012,31(01):127-129+132.

ZHANG Feng-lie, FU Xing, LIN Qian, et al. Real-time control system for spot area of high power pulsed laser[J]. 2012, 31(1): 127-129+132.
[1]张峰烈,傅星,林谦,胡小唐.大功率脉冲激光光斑面积的实时控制系统[J].传感器与微系统,2012,31(01):127-129+132. DOI： 10.13873/j.1000-97872012.01.002.

ZHANG Feng-lie, FU Xing, LIN Qian, et al. Real-time control system for spot area of high power pulsed laser[J]. 2012, 31(1): 127-129+132. DOI： 10.13873/j.1000-97872012.01.002.

摘要

讨论了大功率脉冲激光光斑面积的实时检测与控制方法

研制了采用波长532 nm的连续激光器和CCD—FPGA技术来脉冲激光光斑面积实时控制系统。实验分析了本系统的技术特性:激光光斑、CCD视频信号以及二值化信号;CCD视频信号二值化阈值为405 mV

而FPGA的控制误差范围为十进制数24;计算及标定激光光斑面积

光斑面积测量的相对误差最大为0.5%

而绝对误差在8μm2范围内。本系统可以直接应用于激光微抛光的能量密度实时控制。

Abstract

Real-time detection and control method for spot area of high-power pulsed laser is discussed.The laser spot area real-time control system that adopts a continuous laser whose wavelength is 532 nm and CCD-FPGA technology is developed.The characteristics of system are analyzed according to several experiments inlcuding the analysis for laser spot

CCD video signal and binarization signal.The binarization threshold of CCD video signal is 405 mV

FPGA’s control error range is 24 which is 10 binary.Calculation and calibration of laser spot area

the maximum relative measurement error of spot area is 0.5 % and the absolute error range is 8 μm2.The system can be directly applied in real-time control for the laser fluence in laser micro-polishing.

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references

应用于短脉冲激光加工的自动调焦系统 [J]. 邬泳,傅星,周志远,刘春阳,孙凤鸣,胡小唐. 传感器与微系统 . 2010(05)

用于CCD图像采集的自动聚焦控制系统设计 [J]. 郑春阳,李永新,李胜利. 测控技术 . 2004(05)

光学显微镜自动聚焦的技术研究 [J]. 吴振锋,左洪福,邱根良. 光学仪器 . 2000(04)

Pulsed laser polishing of micro-milled Ti6Al4V samples [J] . Tyler L. Perry,Dirk Werschmoeller,Xiaochun Li,Frank E. Pfefferkorn,Neil A. Duffie. Journal of Manufacturing Processes . 2009 (2)

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