MEMS vector hydrophone is a new type of underwater acoustic sensors.Its principle is introduced briefly.The deep-sea experimental research is conducted in order to verify the performance of target estimation of MEMS vector sensor array by using MUSIC algorithm.The experimental result verifies the effectiveness of MEMS vector sensor array

it shows that the direction estimation and the tracking of underwater moving target can be achieved by using the MEMS vector sensor array.It establishes the theoretical foundation for engineering application.