Design on a phase method PSD micro-displacement measurement system based on LabVIEW

WU Teng-jiao; XUE Lian; DUAN Ying; XI Feng; QIN Lan

doi:10.13873/j.1000-97872011.12.041

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Design on a phase method PSD micro-displacement measurement system based on LabVIEW

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- Design on a phase method PSD micro-displacement measurement system based on LabVIEW
- Vol. 30, Issue 12, Pages: 116-118(2011)
- 作者机构：
  
  重庆大学光电技术及系统教育部重点实验室
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872011.12.041
  CLC： TP274
- Published：2011
- 稿件说明：
移动端阅览
[1]吴腾蛟,薛联,段莹,席锋,秦岚.一种基于LabVIEW的相位法PSD微位移测量系统设计[J].传感器与微系统,2011,30(12):116-118.

WU Teng-jiao, XUE Lian, DUAN Ying, et al. Design on a phase method PSD micro-displacement measurement system based on LabVIEW[J]. 2011, 30(12): 116-118.
[1]吴腾蛟,薛联,段莹,席锋,秦岚.一种基于LabVIEW的相位法PSD微位移测量系统设计[J].传感器与微系统,2011,30(12):116-118. DOI： 10.13873/j.1000-97872011.12.041.

WU Teng-jiao, XUE Lian, DUAN Ying, et al. Design on a phase method PSD micro-displacement measurement system based on LabVIEW[J]. 2011, 30(12): 116-118. DOI： 10.13873/j.1000-97872011.12.041.

摘要

基于相位法的位置敏感探测器（PSD）检测技术较之幅值法具有处理电路简单、检测精度高、抗干扰能力强、环境适应性好等优点。利用二维双面分流型PSD和LabVIEW虚拟仪器平台

实现了基于相位法的PSD微位移测量系统的设计。实验表明:PSD输出信号的相位差和光斑位置具有良好的线性关系

非线性误差小于0.1%。

Abstract

PSD detection technique based on phase method has advantages of simple processing circuit

high detecting precision

strong anti-interference ability and good environmental adaptability

compared with amplitude method.A micro-displacement measurement system based on LabVIEW and 2D duo-lateral PSD is designed.Experimental results reveal that the phase difference of the PSD output signal and the light spot position have good linear relation

and the nonlinear error is less than 0.1 %.

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references

PSD相位法测量技术研究 [J]. 秦岚,刘志辉. 传感技术学报 . 2009(05)

一种基于DSP的相位差测量技术研究与实现 [J]. 潘树国,张敏,王庆. 舰船电子工程 . 2008(08)

PSD幅值定位法多光束同步检测技术研究 [J]. 孙先逵,秦岚,李青. 传感技术学报 . 2007(02)

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