Design of a kind of integrative sensor of flow pressure temperature

ZHANG Ning1; NIU Wei1; XU Dong1; LIU Qi-zhong2; WANG Yang1

doi:10.13873/j.1000-97872011.11.037

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Design of a kind of integrative sensor of flow pressure temperature

更新时间：2025-09-11

- Design of a kind of integrative sensor of flow pressure temperature
- Vol. 30, Issue 11, Pages: 105-107(2011)
- 作者机构：
  
  1. 中国电子科技集团公司第四十九研究所
  2. 第二炮兵驻哈军代室
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872011.11.037
  CLC： TP212.12
- Published：2011
- 稿件说明：
移动端阅览
[1]张宁,牛薇,徐冬,刘其中,汪洋.一种流量压力温度一体化传感器的设计[J].传感器与微系统,2011,30(11):105-107.

ZHANG Ning1, NIU Wei1, XU Dong1, et al. Design of a kind of integrative sensor of flow pressure temperature[J]. 2011, 30(11): 105-107.
[1]张宁,牛薇,徐冬,刘其中,汪洋.一种流量压力温度一体化传感器的设计[J].传感器与微系统,2011,30(11):105-107. DOI： 10.13873/j.1000-97872011.11.037.

ZHANG Ning1, NIU Wei1, XU Dong1, et al. Design of a kind of integrative sensor of flow pressure temperature[J]. 2011, 30(11): 105-107. DOI： 10.13873/j.1000-97872011.11.037.

摘要

为了实现多参数综合测量

设计出一种小流量、压力、温度一体化传感器

该传感器主要由敏感元件和调理电路组成

信号输出采用0～5 V模拟输出。对传感器进行各项环境试验

试验结果表明:该传感器流量精度优于3%

压力精度优于0.2%

温度精度优于0.5%

流量热零点漂移小于0.2%FS/℃

压力热零点漂移小于0.1%FS/℃

满足使用要求。

Abstract

The principle

design technology and fabrication of a kind of integrative sensor of small flow

pressure

temperature is introduced.The sensor is made up of sensitive element and modulating circuit is introduced.The signal output ranges 0 ～5V.Various environmental experiments are carried out on transducers

the results show that the flow precision reaches 3 %

the pressure precision reaches 0.2 %

the temperature precision reaches 0.5 %

and the flow thermal zero drift is less than 0.2 %FS/℃

the pressure thermal zero drift is less than 0.1 %FS/℃.This transducer can satisfy the request of user.

关键词

Keywords

references

高精度温度、压力、电流综合传感器及其测控仪表的设计 [J]. 刘其中. 价值工程 . 2010(27)

介观压阻型微压力传感器设计 [J]. 王伟,温廷敦. 电子设计工程 . 2009(02)

科里奥利质量流量计原理及其应用 [J]. 董红超,陈良. 舰船防化 . 2008(04)

一种新型硅基厚膜压力/温度传感器的设计和制作 [J]. 张艳红,刘兵武,刘理天,张兆华,谭智敏,林惠旺. 传感技术学报 . 2006(06)

铂电阻测温系统温度补偿方法 [J]. 陆阳,韩江洪,魏臻,张维勇. 仪器仪表学报 . 2000(03)

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