Research and fabrication of multi-parameter microsensor array for water quality monitoring based on integrated reference electrode

ZHANG Huan-huan1; LIU Bin1; JIN Qing-hui2; LIU Yong-song1

doi:10.13873/j.1000-97872011.10.038

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Research and fabrication of multi-parameter microsensor array for water quality monitoring based on integrated reference electrode

更新时间：2025-09-11

- Research and fabrication of multi-parameter microsensor array for water quality monitoring based on integrated reference electrode
- Vol. 30, Issue 10, Pages: 99-101+105(2011)
- 作者机构：
  
  1. 浙江理工大学理学院
  2. 中国科学院上海微系统与信息技术研究所传感技术联合国家重点实验室
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872011.10.038
  CLC： TP212.2
- Published：2011
- 稿件说明：
移动端阅览
[1]张缓缓,刘彬,金庆辉,刘咏松.基于集成参比电极的多参数水质监测微传感器阵列研制[J].传感器与微系统,2011,30(10):99-101+105.

ZHANG Huan-huan1, LIU Bin1, JIN Qing-hui2, et al. Research and fabrication of multi-parameter microsensor array for water quality monitoring based on integrated reference electrode[J]. 2011, 30(10): 99-101+105.
[1]张缓缓,刘彬,金庆辉,刘咏松.基于集成参比电极的多参数水质监测微传感器阵列研制[J].传感器与微系统,2011,30(10):99-101+105. DOI： 10.13873/j.1000-97872011.10.038.

ZHANG Huan-huan1, LIU Bin1, JIN Qing-hui2, et al. Research and fabrication of multi-parameter microsensor array for water quality monitoring based on integrated reference electrode[J]. 2011, 30(10): 99-101+105. DOI： 10.13873/j.1000-97872011.10.038.

摘要

研究了一种基于MEMS工艺制备的集成微电极型传感器

并用电化学修饰方法将Ag/AgCl参比电极集成在传感器上

用于水体中温度、电导率和氧化还原电位的测定。Pt温度传感器的电阻与温度的线性关系良好

满足温度测量精度的需求;比较法确定电导率传感器的电极常数为2.723

可以对一般水体的电导率进行测定;氧化还原电位传感器的标准曲线斜率为0.99733接近于理论值

表明它可以准确表示水体的氧化还原电位值。

Abstract

An integrated microelectrode type sensor consisting of Ag/AgCl reference electrode for simultaneous measurement of temperature

conductivity and oxidation reduction potential（ORP）is fabricated using micro-electro-mechanical systems（MEMS）technology and electrochemical modification method.The resistance and the temperature has a good linear relationship.The constant of the conductivity electrode is 2.723

so this sensor can measure the general water conductivity.Compared with the slope of the commercial ORP instrument

the slope of the integrated ORP sensor（0.997 33）is close to the theoretical slope（1.000 0）against quinhydrone calibration solutions.

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references

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电导率传感器发展概况 [J]. 周明军,尤佳,秦浩,傅巍,刘其中,徐振忠. 传感器与微系统 . 2010(04)

用于水质检测的微传感器及微系统 [J]. 卞贺明,夏善红. 微纳电子技术 . 2009(06)

Fabrication and characterization of an innovative integrated solid-state microelectrode [J] . You-Peng Chen,Yue Zhao,Jian Chu,Shao-Yang Liu,Wen-Wei Li,Gang Liu,Yang-Chao Tian,Ying Xiong,Han-Qing Yu. Electrochimica Acta . 2010 (20)

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