Design on NIR spectrometer based on MEMS technology for gas detecting

SU Lei-long1; JIANG Shu-bo1; CHENG Ming-xiao1; HE Ye2; XU Bo3; LI Sheng3

doi:10.13873/j.1000-97872011.10.009

Chinese

您当前的位置：

首页 >

文章列表页 >

Design on NIR spectrometer based on MEMS technology for gas detecting

更新时间：2025-09-11

- Design on NIR spectrometer based on MEMS technology for gas detecting
- Vol. 30, Issue 10, Pages: 120-122(2011)
- 作者机构：
  
  1. 南京工业大学自动化与电气工程学院精密仪器研究所
  2. 南京工业大学高技术研究院
  3. 江苏英特神斯科技有限公司
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872011.10.009
  CLC： TH744.1
- Published：2011
- 稿件说明：
移动端阅览
[1]苏雷龙,蒋书波,程明霄,何野,徐波,李晟.气体检测中基于MEMS技术的近红外光谱仪设计[J].传感器与微系统,2011,30(10):120-122.

SU Lei-long1, JIANG Shu-bo1, CHENG Ming-xiao1, et al. Design on NIR spectrometer based on MEMS technology for gas detecting[J]. 2011, 30(10): 120-122.
[1]苏雷龙,蒋书波,程明霄,何野,徐波,李晟.气体检测中基于MEMS技术的近红外光谱仪设计[J].传感器与微系统,2011,30(10):120-122. DOI： 10.13873/j.1000-97872011.10.009.

SU Lei-long1, JIANG Shu-bo1, CHENG Ming-xiao1, et al. Design on NIR spectrometer based on MEMS technology for gas detecting[J]. 2011, 30(10): 120-122. DOI： 10.13873/j.1000-97872011.10.009.

摘要

根据传统近红外光谱仪的不足

利用MEMS微镜设计了近红外光谱仪的光路

并给出了仪器的设计框架

设计了仪器的上位机程序;利用单色仪和29.4%的甲烷气体样品和对样机进行测试

实验结果表明:在10～35℃内

仪器波长稳定性小于2 nm

并能够观测到甲烷在1650 nm附近吸光度约为0.01的吸收峰。MEMS技术应用在近红外光谱仪中

对于气体检测是可行的

并且能够使仪器做到便携式。

Abstract

According to the deficiency of traditional NIR spectrometer

a light path of NIR spectrometer by MEMS micro-mirror

overall framework and the computer program are designed.The instrument tested by monochromator and CH4 gas of 29.4 %.The results show that between 10

5 ℃

wavelength stability can be reached within 2 nm and an absorption peak of 0.01 absorbency of CH4 near 1 650 nm can also be observed.The MEMS micro-mirror can be applied in the NIR spectrometer for gas detecting

and it makes the instrument portable.

关键词

Keywords

references

闪耀光栅原理及其应用 [J]. 张发国,喻洪麟. 重庆文理学院学报(自然科学版) . 2008(01)

近红外光谱仪新进展 [J]. 褚小立,陆婉珍. 分析仪器 . 2008(01)

MEMS可编程光栅及其在气体监测中的应用研究 [D]. 安飞. 西北工业大学 2007

现代近红外光谱分析技术[M]. 中国石化出版社 , 陆婉珍等编著, 2000

光谱仪器原理[M]. 北京理工大学出版社 , 李全臣,蒋月娟编著, 1999

物理光学[M]. 机械工业出版社 , 梁铨廷编, 1987

Single-detector micro-electro-mechanical scanning grating spectrometer [J] . M. Kraft,A. Kenda,A. Frank,W. Scherf,A. Heberer,T. Sandner,H. Schenk,F. Zimmer. Analytical and Bioanalytical Chemistry . 2006 (5)

Views

319

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

A model analytical method of multi-DOF electrothermal MEMS micro-mirror

Design of single light source multi-component infrared online analyzer

Design of non-dispersive infrared gas analyzer based on industry ethernet

Inflammable gas analysis based on distributed multi-subnet neural networks

Analysis of mixed inflammable gases based on single sensor and RBF network

Related Author

XIE Hui-kai

CHEN Qiao

XU Da-cheng

ZHANG Hao

LIU Hong-fei

CHEN Ming-qi

CHENG Ming-xiao

LU Chun-yu

Related Institution

Wuxi WiO Technology Co Ltd

College of Electronics and Information Science,Soochow University

Department of Electrical and Computer Engineering,University of Florida

School of Automation and Electrical Engineering,Nanjing University of Technology

Nanjing Analytical Instrument Factory Co Ltd

⁰