Study on electric resistivity of thin film materials for GIGS solar cell

QIAN Qun; ZHANG Cong-chun; YANG Chun-sheng; DING Gui-fu

doi:10.13873/j.1000-97872011.04.017

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Study on electric resistivity of thin film materials for GIGS solar cell

更新时间：2025-09-11

- Study on electric resistivity of thin film materials for GIGS solar cell
- Vol. 30, Issue 4, Pages: 22-24(2011)
- 作者机构：
  
  上海交通大学微纳科学技术研究院微米/纳米加工技术国家重点实验室薄膜与微细技术教育部重点实验室
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872011.04.017
  CLC： TM914.4
- Published：2011
- 稿件说明：
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[1]钱群,张丛春,杨春生,丁桂甫.CIGS太阳能电池中薄膜材料电阻率的研究[J].传感器与微系统,2011,30(04):22-24.

QIAN Qun, ZHANG Cong-chun, YANG Chun-sheng, et al. Study on electric resistivity of thin film materials for GIGS solar cell[J]. 2011, 30(4): 22-24.
[1]钱群,张丛春,杨春生,丁桂甫.CIGS太阳能电池中薄膜材料电阻率的研究[J].传感器与微系统,2011,30(04):22-24. DOI： 10.13873/j.1000-97872011.04.017.

QIAN Qun, ZHANG Cong-chun, YANG Chun-sheng, et al. Study on electric resistivity of thin film materials for GIGS solar cell[J]. 2011, 30(4): 22-24. DOI： 10.13873/j.1000-97872011.04.017.

摘要

研究了减小CIGS太阳能电池中Mo

CIGS

n-ZnO三层薄膜电阻率的溅射工艺方法

以达到减小电池串联电阻的目的。改变工艺参数制备不同样品并对其进行测试分析

得到了溅射气压、衬底温度、退火工艺对电阻率和薄膜微观形貌的影响。证明了采用双层溅射法制备的Mo、低气压、衬底加热、溅射后退火得到的CIGS以及3～5 Pa下制备的n-ZnO都有较好的薄膜质量和较低的电阻率。

Abstract

In order to reduce electric resistivity of three-layer thin film materials and finally reduce series resistance of CIGS solar cell

improvements of sputtering technics for Mo

CIGS and n-ZnO have been investigated.Different samples are prepared at different fabricating conditions.The influences of sputtering air pressure

substrate temperature and anneal technique on electric resistivity and microstructure are given by analyzing test results.It has been testified that Mo gained by double-layer sputtering

CIGS gained at low sputtering air pressure with substrate heated and then annealed

n-ZnO gained when sputtering pressure is around 3

Pa have relatively better quality and lower electric resistivity.

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Keywords

references

Present status and future prospects of CIGSS thin film solar cells [J] . Neelkanth G. Dhere. Solar Energy Materials and Solar Cells . 2006 (15)

Sputtered molybdenum bilayer back contact for copper indium diselenide-based polycrystalline thin-film solar cells [J] . John H. Scofield,A. Duda,D. Albin,B.L. Ballard,P.K. Predecki. Thin Solid Films . 1995 (1)

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