Research and fabrication of a low-cost valveless micropump based on piezoelectric actuation

XU Liang; YING Ji; LI Jun

doi:10.13873/j.1000-97872011.03.008

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Research and fabrication of a low-cost valveless micropump based on piezoelectric actuation

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- Research and fabrication of a low-cost valveless micropump based on piezoelectric actuation
- Vol. 30, Issue 3, Pages: 101-104(2011)
- 作者机构：
  
  浙江大学机械工程学系
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872011.03.008
  CLC： TH323
- Published：2011
- 稿件说明：
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[1]徐亮,应济,李俊.一种低成本压电无阀微泵的研制[J].传感器与微系统,2011,30(03):101-104.

XU Liang, YING Ji, LI Jun. Research and fabrication of a low-cost valveless micropump based on piezoelectric actuation[J]. 2011, 30(3): 101-104.
[1]徐亮,应济,李俊.一种低成本压电无阀微泵的研制[J].传感器与微系统,2011,30(03):101-104. DOI： 10.13873/j.1000-97872011.03.008.

XU Liang, YING Ji, LI Jun. Research and fabrication of a low-cost valveless micropump based on piezoelectric actuation[J]. 2011, 30(3): 101-104. DOI： 10.13873/j.1000-97872011.03.008.

摘要

提出了一种低成本的由压电材料驱动的平面扩张/收缩管无阀微泵的制作工艺。通过数值模拟确定了扩张/收缩管扩张角的最优值

在此基础上

采用光刻和湿法刻蚀工艺

刻蚀了300μm深的泵腔基片和100μm深的盖片;使用等离子体清洗技术将其与PDMS薄膜键合

完成了可以实现单向泵送的压电无阀微泵样机制作。研究了该压电无阀微泵样机的性能

分别分析了压电振子的激励频率、电压和微泵背压对其流量的影响。实验结果表明:在100 V

110 Hz交流方波电压信号的作用下

微泵有最大输出流量为436μL/min

最大背压为620 Pa。

Abstract

A low-cost valveless micropump based on piezoelectric actuation is presented.The optimized value of opening angle is obtained by numerical simulation

which is the reference of design parameters of the diffuser/nozzle element.A 300 μm depth of pump chamber substrate and a 100 μm depth of cover are fabricated on pyrex glass using photographic and wet chemical etching processes.Then

by using plasma cleaning technology

they are bonded to PDMS membrane to accomplish the fabrication of the micropump.The maximum flow rate and backpressure of the pump are about 436 μL/min and 620 Pa when applying a 100V square wave driving voltage at 110 Hz across the piezoelectric-disc.

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references

PZT压电薄膜无阀微泵 [J]. 高晓光,杜立群,吕岩. 功能材料与器件学报 . 2008(04)

PZT压电薄膜无阀微泵的制备工艺及实验研究 [J]. 杜立群,高晓光,董维杰,吕岩. 压电与声光 . 2008(04)

一种基于MEMS技术的压电微泵的研究 [J]. 王海宁,崔大付,耿照新,陈兴. 传感器与微系统 . 2006(08)

制造玻璃微流控芯片的简易加工技术 [J]. 殷学锋,沈宏,方肇伦. 分析化学 . 2003(01)

Novel multi-depth microfluidic chip for single cell analysis [J] . Sun Yue,Yin Xue-Feng. Journal of Chromatography A . 2006 (2)

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