Research of high precision fast focus method for optical auto-detector

CHENG Liang-lun; PAN Jian-hua

doi:10.13873/j.1000-97872011.02.039

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Research of high precision fast focus method for optical auto-detector

更新时间：2025-09-11

- Research of high precision fast focus method for optical auto-detector
- Vol. 30, Issue 2, Pages: 41-43+46(2011)
- 作者机构：
  
  广东工业大学自动化学院
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872011.02.039
  CLC： TP216
- Published：2011
- 稿件说明：
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[1]程良伦,潘健华.高精度光学自动检测仪快速对焦方法研究[J].传感器与微系统,2011,30(02):41-43+46.

CHENG Liang-lun, PAN Jian-hua. Research of high precision fast focus method for optical auto-detector[J]. 2011, 30(2): 41-43+46.
[1]程良伦,潘健华.高精度光学自动检测仪快速对焦方法研究[J].传感器与微系统,2011,30(02):41-43+46. DOI： 10.13873/j.1000-97872011.02.039.

CHENG Liang-lun, PAN Jian-hua. Research of high precision fast focus method for optical auto-detector[J]. 2011, 30(2): 41-43+46. DOI： 10.13873/j.1000-97872011.02.039.

摘要

为提高光学自动检测设备中自动对焦的准确性、快速性和稳定性

提出一种新型的高精度快速自动对焦技术方案。该系统利用光学三角法测距原理将汇聚到工作台上的激光光斑成像在CCD上

再利用光斑灰阶的变化实现精密对焦。实验结果表明:显微镜重复对焦精度可以达到0.1μm

对焦时间小于200m s

满足工业光学检测系统中实际应用的需要。

Abstract

To improve the auto-focus（AF）accuracy

speed and stability of optical auto-analyzer

a novel fast high precision AF technology is proposed.Laser beam is condensed to the working table and then the image of laser pattern is formed at the CCD based on laser trigonometry.So the change of gray spot can be used to realize focusing.Experimental results show that repetition focusing precision can reach 0.1μm

focusing time is less than 200ms

and can meet practical application requirements for the industrial optical inspection systems.

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references

一种新型光学快速自动聚焦系统 [J]. 范富明,程良伦,王晓芬,潘建华. 光电工程 . 2010(05)

采用最大灰度梯度法实现经纬仪自动调焦控制 [J]. 梁敏华,吴志勇,陈涛. 光学精密工程 . 2009(12)

基于线阵CCD的光斑定位算法研究 [J]. 尚学军,何明一,王军良. 激光与红外 . 2008(07)

图像中CCD光斑中心的亚像素定位研究 [J]. 周红锋,宫爱玲. 计量技术 . 2007(11)

CCD超分辨率位置测量方法及性能分析 [J]. 严军,董志华. 测试技术学报 . 2006(03)

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