Study on displacement measurement technology of microgripper based on vision

WANG Wen-jing; CHU Jin-kui; ZHANG Ran; ZHANG Cheng

doi:10.13873/j.1000-97872011.02.008

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Study on displacement measurement technology of microgripper based on vision

更新时间：2025-09-11

- Study on displacement measurement technology of microgripper based on vision
- Vol. 30, Issue 2, Pages: 44-46(2011)
- 作者机构：
  
  大连理工大学辽宁省微纳米技术及系统重点实验室
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872011.02.008
  CLC： TH703
- Published：2011
- 稿件说明：
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[1]王文静,褚金奎,张然,张成.基于视觉的微夹钳位移测试技术研究[J].传感器与微系统,2011,30(02):44-46.

WANG Wen-jing, CHU Jin-kui, ZHANG Ran, et al. Study on displacement measurement technology of microgripper based on vision[J]. 2011, 30(2): 44-46.
[1]王文静,褚金奎,张然,张成.基于视觉的微夹钳位移测试技术研究[J].传感器与微系统,2011,30(02):44-46. DOI： 10.13873/j.1000-97872011.02.008.

WANG Wen-jing, CHU Jin-kui, ZHANG Ran, et al. Study on displacement measurement technology of microgripper based on vision[J]. 2011, 30(2): 44-46. DOI： 10.13873/j.1000-97872011.02.008.

摘要

微夹钳输出位移是它的一个重要特性

微夹钳整体尺寸比较小

不能用常规方法测量输出位移。针对微夹钳的特点

提出一种微夹钳位移测试方法

采用非接触式测量

设计了一种基于视觉的微位移测试装置

并开发了配套的测量软件。测试软件通过LabVIEW软件平台实现

能够实现图像标定、测量和图像标注等功能。给出了详细的图像标定方法

通过台式测微尺实现。最后对微夹钳进行位移测试实验

验证了测量装置的可用性

并总结出微夹钳位移随电压变化的规律。位移测量装置的精度为±1μm

且具有一定的通用性

可用于其他MEMS器件的位移测试。

Abstract

Displacement is one of the microgripper’s key features

the conventional methods can not be used for measuring its output displacement because of the small size of the microgripper.According to its characteristics

a displacement test method is proposed for the microgripper

using the non-contact measurement

a vision-based micro-displacement measurement devices is designed and the measurement software package is developed.The test software is compiled by the LabVIEW graphical programming language.The program can be realized image calibration

measurement

and image annotation features.A detailed image calibration method is realized through a desktop micrometer.The displacement of microgripper testing experiments is carried out to verify the availability of measuring devices

and summarizes the changing rules of displacement variation with voltage.The device has a certain generality

can be used for displacement test of other MEMS devices

and its precision is ±1μm.

关键词

Keywords

references

数字图像处理在距离测量中的应用 [J]. 唐艳丽,苏燕辰. 中国测试 . 2009(01)

柔性电热镍微夹钳结构设计及加工测试研究 [J]. 褚金奎,郝秀春,关乐,王立鼎. 大连理工大学学报 . 2007(03)

ME MS的光学检测方法和仪器 [J]. 赵旭辉,曲兴华,叶声华,何滢,宋丽梅. 光学技术 . 2003(02)

CCD摄像法在工件尺寸测量中的应用 [J]. 林晓峰,石少莉. 光学仪器 . 2002(03)

虚拟仪器图形化编程语言LabVIEW教程[M]. 西安电子科技大学出版社 , 刘君华等编著, 2001

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