20 % Sn4+-doped Titania films humidity element prepared on the quartz glass substrate was analyzed by using complex impedance analysis

the impedance spectra were protracted in different humidity by Origin7.5 software.Under the Zsimpwin software environment

three different equivalent circuits models were used for fitting the impedance spectra of the element

error analyzing and contrasting.The results show that the equivalent circuit of Q component is reasonable.It is convenient for the analysis of the diffusion of the ion on the thin films and the humidity sensing mechanism.