Development of micro/nano-machine anti-adhesion study

YUE Lu-you1; HE Xing-chun1; DING Jian-ning1; YANG Ji-chang1; MA Hao-chen1

doi:10.13873/j.1000-97872010.12.002

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Development of micro/nano-machine anti-adhesion study

更新时间：2025-09-11

- Development of micro/nano-machine anti-adhesion study
- Vol. 29, Issue 12, Pages: 5-8+11(2010)
- 作者机构：
  
  1. 江苏大学机械工程学院
  2. 常州大学机械与能源工程学院
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872010.12.002
  CLC： TH703
- Published：2010
- 稿件说明：
移动端阅览
[1]岳陆游,何兴春,丁建宁,杨继昌,马皓晨.微/纳机构抗粘附研究进展[J].传感器与微系统,2010,29(12):5-8+11.

YUE Lu-you1, HE Xing-chun1, DING Jian-ning1, et al. Development of micro/nano-machine anti-adhesion study[J]. 2010, 29(12): 5-8+11.
[1]岳陆游,何兴春,丁建宁,杨继昌,马皓晨.微/纳机构抗粘附研究进展[J].传感器与微系统,2010,29(12):5-8+11. DOI： 10.13873/j.1000-97872010.12.002.

YUE Lu-you1, HE Xing-chun1, DING Jian-ning1, et al. Development of micro/nano-machine anti-adhesion study[J]. 2010, 29(12): 5-8+11. DOI： 10.13873/j.1000-97872010.12.002.

摘要

粘附现象是微/纳机构中特有的现象

在构件材料强度满足要求的条件下

微/纳机构中的粘附和摩擦是造成其失效的主要原因。如何防止或减轻粘附已成为微/纳机电系统（MEMS/NEMS）领域的研究热点。介绍了微/纳机构中的粘附问题

分析了粘附机理和各种粘附接触模型

说明了表面能法和微凸体积分法防粘附设计微/纳机构的原理

最后阐述了释放干燥工艺、减少实际接触面积和降低表面能等各种抗粘附措施。

Abstract

Adhesion is a peculiar phenomenon of micro/nano-machine.When the strength of the component’s material meets the demand

the adhesion and friction in the micro/nano-machines are the main cause of their failure.To overcome or reduce adhesion has become the hotspot in the micro/nano-electromechanical systems（MEMS/NEMS） research field.The adhesion issue in the micro/nano-machines is introduced.The mechanisms of adhesion and various adhensive models used in adhesive contact are analyzed.The micro/nano-machines’ design principle of anti-adhesion using surface energy method and asperity integral method is illustrated.Various anti-adhesion methods such as release dry processes

real contact area reducing

and surface energy reducing

are presented.

关键词

Keywords

references

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MEMS微变形镜测试及工艺防粘附技术研究 [D]. 马志波. 西北工业大学 2007

纳米科技概论[M]. 国防工业出版社 , 沈海军, 2007

Adhesion in elastic–plastic spherical microcontact [J] . Lior Kogut,Izhak Etsion. Journal of Colloid And Interface Science . 2003 (2)

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